Substrate-type CdTe thin-film solar cells with a carbon/CdTe/CdS/ZnO:Al/Ag structure were fabricated. For promoting the formation of the CdSxTe1-x mixed crystal layer in the CdS/CdTe interface, the heat treatment (a face-to-face annealing at 600 °C and the second CdCl2 treatment at 415 °C) of the CdS/CdTe:Cu structure was performed after the CdS deposition. Junction photoluminescence and the compositional depth profile revealed that the CdSxTe1-x mixed crystal layer was formed in the CdS/CdTe interface as a result of the heat treatment after the CdS deposition. The cell performance was slightly improved due to the heat treatment after the CdS deposition, but the conversion efficiency remained low (less than 2%), probably due to the decrease in the acceptor concentration in CdTe layer. For improving cell performance, Cu diffusion was performed after the heat treatment of the CdS/CdTe structure (second Cu doping), in addition to the Cu doping before the CdS deposition (first Cu doping). The conversion efficiency increased with increasing Cu concentration in the second Cu doping, and approximately 10% efficiency was achieved.