2007
DOI: 10.18524/1815-7459.2007.1.113085
|View full text |Cite
|
Sign up to set email alerts
|

Investigation of Electrophysical Parameters of Silicon P-I-N Photodiodes

Abstract: Äîñë³äaeåíî åëåêòðîôiçè÷íi ïàðàìåòðè òåñòîâèõ ñòðóêòóð íà âèñîêîîìíîìó êðåìíi¿, ÿêi ñôîðìîâàíi â ïðîöåñi âèãîòîâëåííÿ p-i-n ôîòîäiîäiâ. Ç äîïîìîãîþ òåñòîâèõ ÌÄÍ ñòðóêòóð ñïåöiàëüíî¿ êîíñòðóêöi¿ âèçíà÷åíî ïðàêòè÷íî âàaeëèâi õàðàêòåðèñòèêè ñèñòåì Si-SiO 2 òà Si-SiO 2 -Si 3 N 4 , ÿêi õàðàêòåðèçóþòü ÿêiñòü êðåìíiþ òà ìiaeôàçîâî¿ ãðàíèöi ðîçäiëó äiåëåêòðèêíàïiâïðîâiäíèê: øâèäêiñòü ïîâåðõíåâî¿ ãåíåðàöi¿ S g , îá'ºìíèé ãåíåðàöiéíèé ÷àñ aeèòòÿ íåîñíîâíèõ íîñi¿â çàðÿäó ó êðåìíi¿ τ g , à òàêîae çíà÷åííÿ ôiêñîâàíîãî çàðÿ… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 3 publications
(3 reference statements)
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?