“…Several groups have proposed p‐type contacts based on metals like Pd, Au, Ag, Pt, Ni, and alloys like Ni/Au , Pt/Au , Pd/Au , Ag/Pd , Pd/Ir/Au , or Pd/Ni/Au and have achieved specific contact resistivity as low as 10 −6 Ω cm 2 and attributed this low specific contact resistivity to one or more factors like surface preparation, metal deposition technique, annealing technique , and increase of holes due to acceptor like Ga vacancy creation . However, regarding carrier transport mechanism in p‐contact with low specific contact resistivity, differing theories have been proposed such as trap‐assisted tunnelling enhanced by nitrogen vacancy related defects , tunnelling of carriers through Schottky barrier , thermionic emission (TE) , thermionic field emission (TFE) or carrier transport through deep level defect (DLD) band . Therefore, it is still important to study the p‐GaN layer and the optimization of p‐contact metallization process particularly for In rich InGaN alloy structures and to understand the carrier transport through the metallic contacts.…”