Investigation of high transparent and conductivity of IGZO/Ag/IGZO sandwich structures deposited by sputtering method

Yuan, Zhan-Sheng; Wu, Chia‐Ching; Tzou, Wen-Cheng; Yang, Cheng‐Fu; Chen, Yu‐Hsin

doi:10.1016/j.vacuum.2019.04.030

Cited by 12 publications

(1 citation statement)

References 40 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…After covering this GZO film with the 10-nm thick Ag layer (GA sample), the resistivity decreases to 2.3 × 10 −5 Ω•cm. It is obvious that the conductivity of such a two-layer structure is mainly governed by the continuity and homogeneity of the Ag thin layer [39]. However, as can be seen from Figure 3a, the existence of the Ag layer on top of the 80-nm thick GZO layer substantially reduces the optical transmittance in the visible and near infrared (NIR) regions (the average visible transmittance T av is 41.5%) [28].…”

Section: Optical and Electrical Studiesmentioning

confidence: 99%

Low-Temperature Fabrication of High-Performance and Stable GZO/Ag/GZO Multilayer Structures for Transparent Electrode Applications

et al. 2020

View full text Add to dashboard Cite

Presently, research and development of indium-free stable highly transparent conductive (TC) materials is of paramount importance for the blooming world of information display systems and solar energy conversion. Development of devices based on flexible organic substrates further narrows the choice of possible TC materials due to the need for lower deposition and process temperatures. In our work, the structural, electrical, and optical performances of Ga-doped ZnO/Ag/Ga-doped ZnO (GZO/Ag/GZO) multilayered structures deposited on glass substrates by direct current (DC) magnetron sputtering in a pure Ar medium without any purposeful substrate heating have been investigated. The highest figure of merit achieved was 5.15 × 10−2 Ω−1 for the symmetric GZO/Ag/GZO multilayer, featuring GZO and Ag thicknesses of 40 and 10 nm, respectively, while the average optical transmittance was over 81% in the visible range of wavelengths and the resistivity was 2.2 × 10−5 Ω·cm. Additionally, the good durability of the performances of the multilayer structures was demonstrated by their testing in the context of long-term storage (over 500 days) in standard environmental conditions.

show abstract

Section: Optical and Electrical Studiesmentioning

confidence: 99%