Investigation of Measurement Uncertainty of Optical Freeform Surface Based on Computer-Generated Hologram

Ya, 黄亚 Huang; Jun, 马骏 Ma; Rihong, 朱日宏 Zhu; Hua, 沈华 Shen; Zhishan, 高志山 Gao

doi:10.3788/aos201535.1112007

Cited by 4 publications

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“…However, it requires that the error of surface shape must be within the range of the interferometer. Expensive compensation equipment is also required for aspheric or freeform surface [4][5]. In contrast, reverse Hartmann (or deflectometry) has high sensitivity and large dynamic range [6], and is also not sensitive to environmental disturbances, which is better to assist in-situ surface manufacturing.…”

Section: Introductionmentioning

confidence: 99%

Simulation of display thermal deformation and error analysis in high precision reverse Hartmann test

Fu,

Wang,

Zhang

et al. 2023

Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers

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Section: Introductionmentioning

confidence: 99%

Simulation of display thermal deformation and error analysis in high precision reverse Hartmann test

Fu,

Wang,

Zhang

et al. 2023

Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers

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“…In recent years, more and more attention has been paid to plane measurement methods, which mainly include interferometric testing and structured light 3D measurement. The measurement accuracy of interferometry is high, including sub-aperture stitching technology [10,11], computer-generated hologram (CGH) [12], and fringe reflection method [13]. Among the most popular methods, interferometry is a standard measurement method for high-precision polished optical surfaces and is currently the most accurate optical testing method.…”

Section: Introductionmentioning

confidence: 99%

Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

Ma,

Wang,

Wang

et al. 2023

Micromachines

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Complex optical elements have the advantages of improving image quality and optical performance and expanding the field of view. Therefore, it is widely used in X-ray scientific devices, adaptive optical elements, high-energy laser systems, and other fields and is a hot research direction in precision optics. Especially for precision machining, there is a greater need for high-precision testing technology. However, how to measure complex surfaces efficiently and accurately is still an important research topic in optical metrology technology. In order to verify the ability of optical metrology for complex optical surfaces with wavefront sensing based on image information of the focal plane, some experiment platforms in different types of optical surfaces were set up. In order to validate the feasibility and validity of wavefront-sensing technology based on image information of focal planes, a large number of repetitive experiments were carried out. The measurement results with wavefront sensing based on image information of the focal plane were compared with the measurement results with the ZYGO interferometer. The experimental results demonstrate that good agreement is obtained among the error distribution, PV value, and RMS value of the ZYGO interferometer, which shows the feasibility and validity of wavefront sensing based on image information of focal plane technology in optical metrology for the complex optical surface.

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Measurement of the Aspherical Optical Surfaces with the Improved Phase Retrieval

Wang

et al. 2022

Micromachines

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In order to verify the estimated wave-front ability of the phase retrieval, a method utilized in the measurement of the aspherical optical surfaces using the phase retrieval technology is described. This technique is based on the algorithm as a solution for the measurement of the aspherical optical surfaces, whose principle is sampling a number of the given defocus images and obtaining the phase information by solving the wave-front with Fourier optical diffractive theory and mathematics optimization. We set up an experimental arrangement used to measure the aspherical optical surfaces using the improved phase retrieval. In addition, we introduced the method of optical alignment in detail, which is very important for high-precision measurements. We obtained an agreement among the error distributions, the peak value, and the root-mean-square value of a ZYGO interferometer, which demonstrates that the improved phase retrieval method can effectively estimate the wave-front and the aberrations of aspherical optical surfaces.

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Investigation of Measurement Uncertainty of Optical Freeform Surface Based on Computer-Generated Hologram

Cited by 4 publications

References 0 publications

Simulation of display thermal deformation and error analysis in high precision reverse Hartmann test

Simulation of display thermal deformation and error analysis in high precision reverse Hartmann test

Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

Measurement of the Aspherical Optical Surfaces with the Improved Phase Retrieval

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