Investigation of micron-sized fish-scale surface structures on tool steel surfaces using laser galvanometer scanning

Dai, Wei; Zhang, Weikang; Zheng, Zhizhen; Li, Jianjun

doi:10.1016/j.apsusc.2018.10.264

Cited by 11 publications

(1 citation statement)

References 56 publications

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“…Single-point TPP lithography was initially advanced to realize the fabrication of 3D structures [16]. The method is relatively simple and can be achieved by tuning either the galvanometer or translation stage [17]. However, single-point TPP lithography techniques are normally time-consuming with low fabrication efficiency.…”

Section: Introductionmentioning

confidence: 99%

Multi-Focal Laser Direct Writing through Spatial Light Modulation Guided by Scalable Vector Graphics

et al. 2023

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Multi-focal laser direct writing (LDW) based on phase-only spatial light modulation (SLM) can realize flexible and parallel nanofabrication with high-throughput potential. In this investigation, a novel approach of combining two-photon absorption, SLM, and vector path-guided by scalable vector graphics (SVGs), termed SVG-guided SLM LDW, was developed and preliminarily tested for fast, flexible, and parallel nanofabrication. Three laser focuses were independently controlled with different paths, which were optimized according to the SVG to improve fabrication and promote time efficiency. The minimum structure width could be as low as 81 nm. Accompanied by a translation stage, a carp structure of 18.10 μm × 24.56 μm was fabricated. This method shows the possibility of developing LDW techniques toward fully electrical systems, and provides a potential way to efficiently engrave complex structures on nanoscales.

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Section: Introductionmentioning

confidence: 99%