Investigation of oxide tunnel barriers by atom probe tomography (TAP)

Kuduz, Mario; Schmitz, Guido; Kirchheim, R.

doi:10.1016/j.ultramic.2004.06.003

Cited by 37 publications

(16 citation statements)

References 17 publications

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“…The schematic and instrumental details of the sputter deposition are described elsewhere [5]. It is very important to clean the substrate by ion beam prior to deposition to achieve good mechanical stability of the specimen [15].…”

Section: Methodsmentioning

confidence: 99%

“…Long limited to metals or highly doped semi-conductors, the implementation of ultra fast laser assisted APT has considerably widened the field of application of the technique, making it applicable to semi-conductors, oxides and ceramic materials, which are key materials for micro electronics [1][2][3][4]. It is now possible to analyse high band gap materials like Al 2 O 3 , HfO 2 and MgO [2,5,6]. The study of metal-oxide interfaces is important because of the inter-reaction and inter-diffusion phenomena occurring along the interface between thin layers.…”

Section: Introductionmentioning

confidence: 99%

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Evaporation mechanisms of MgO in laser assisted atom probe tomography

et al. 2011

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Evaporation mechanisms of MgO in laser assisted atom probe tomography

et al. 2011

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“…Kuduz et al 138 have performed APT studies of thin ͑2.5 nm͒ aluminium oxide layers sandwiched between nickel-iron layers ͑Fig. 13͒.…”

Section: Metal/oxide Layered Structurementioning

confidence: 99%

Atom probe tomography

Kelly¹,

Miller

2007

Review of Scientific Instruments

758

345

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The technique of atom probe tomography ͑APT͒ is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution ͑sub-0.3-nm͒ three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and ceramic materials. This trend toward a broader range of materials and applications is likely to continue.

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“…Because of spin polarized tunnelling of electrons through the oxide the resistance depends on the magnetic polarization of the adjacent magnetic films. An example of a cobalt/aluminium oxide/permalloy TMR-structure as it was analysed with the 3-dimensional atom probe is presented in Figure 10 (Ref [13]). Despite the fact that aluminium oxide is an isolator and atom probe analysis is not possible with isolating materials, we succeeded in this case.…”

Section: 4mentioning

confidence: 99%

Chemical Composition of Advanced Materials as Obtained by the 3-Dimensional Atom Probe

Kirchheim

2006

Int. J. Soc. Mater. Eng. Resour

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The 3-dimensional atom probe is based on field ion microscopy where the screen is replaced by a 2-dimensional, position sensitive detector. Atoms were removed from a conducting sample by a high voltage pulse. The time of flight reveals their chemical nature, and continuous stripping allows lateral and in-depth analysis. The spatial resolution permits a chemical analysis on the sub-nanometer scale. Results of this new technique are presented for (i) the initial stages of interdiffusion at the boundary between two metals, (ii) P-segregation at grain boundaries in nanocrystalline Ni-P alloys, (iii) initial stages of nucleation and growth in various alloys, (iv) composition of thin oxide films in TMR-structures, and (v) distribution of hydrogen in metallic multilayers. It will be also shown that the new technique not only allowed a characterization on the atomic scale but verified and/or falsified existing models for the examples given before.

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Investigation of oxide tunnel barriers by atom probe tomography (TAP)

Cited by 37 publications

References 17 publications

Evaporation mechanisms of MgO in laser assisted atom probe tomography

Evaporation mechanisms of MgO in laser assisted atom probe tomography

Atom probe tomography

Chemical Composition of Advanced Materials as Obtained by the 3-Dimensional Atom Probe

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