Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors

Hayashi, Yuichiro; Yamazaki, Hiroto; Ono, Daiki; Masunishi, Kei; Ikehashi, Tamio

doi:10.1016/j.ijhydene.2018.03.149

Cited by 29 publications

(18 citation statements)

References 17 publications

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“…Nevertheless, this challenge has not been addressed until rather recently by alloying Pd with other metals, including PdAu, 19 , 231 , 243 , 244 , 253 PdCu, 58 PdNi, 242 PdTa, 254 and ternary PdAuCu 58 and PdCuSi alloys. 255 Depending on the atomic radius of the alloyants, two types of pressure–composition isotherms exist. First, for alloyants with an atomic radius larger than Pd, e.g., Au, hysteresis shrinks symmetrically and disappears at room temperature (RT) at ca.…”

Section: Rational Design Of Nanostructured Pd-based Hydrogen Sensorsmentioning

confidence: 99%

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High-Performance Nanostructured Palladium-Based Hydrogen Sensors—Current Limitations and Strategies for Their Mitigation

Nugroho²,

2020

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Hydrogen gas is rapidly approaching a global breakthrough as a carbon-free energy vector. In such a hydrogen economy, safety sensors for hydrogen leak detection will be an indispensable element along the entire value chain, from the site of hydrogen production to the point of consumption, due to the high flammability of hydrogen–air mixtures. To stimulate and guide the development of such sensors, industrial and governmental stakeholders have defined sets of strict performance targets, which are yet to be entirely fulfilled. In this Perspective, we summarize recent efforts and discuss research strategies for the development of hydrogen sensors that aim at meeting the set performance goals. In the first part, we describe the state-of-the-art for fast and selective hydrogen sensors at the research level, and we identify nanostructured Pd transducer materials as the common denominator in the best performing solutions. As a consequence, in the second part, we introduce the fundamentals of the Pd–hydrogen interaction to lay the foundation for a detailed discussion of key strategies and Pd-based material design rules necessary for the development of next generation high-performance nanostructured Pd-based hydrogen sensors that are on par with even the most stringent and challenging performance targets.

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Section: Rational Design Of Nanostructured Pd-based Hydrogen Sensorsmentioning

confidence: 99%

“… 258 , 259 From a sensing perspective, this leads to a lower sensitivity in the low hydrogen partial pressure regime. 209 , 255 …”

Section: Rational Design Of Nanostructured Pd-based Hydrogen Sensorsmentioning

confidence: 99%

High-Performance Nanostructured Palladium-Based Hydrogen Sensors—Current Limitations and Strategies for Their Mitigation

Nugroho²,

2020

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“…We proposed a capacitive MEMS hydrogen sensor 11,12 . That sensor featuring excellent characteristics in terms of low power consumption, fast response, and hysteresis‐free operation, was designed for hydrogen leakage detection, and detectable concentration range was limited.…”

Section: Introductionmentioning

confidence: 99%

Integrated hybrid MEMS hydrogen sensor with high sensitivity and high dynamic range

Hayashi

Yamazaki

Masunishi

et al. 2020

Electrical Engineering Japan

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This paper discusses an integrated hybrid MEMS hydrogen sensor that detects hydrogen in the range from 5 ppm to 100 vol%. The sensor is a single chip comprising both capacitive and thermal conductivity hydrogen sensors that can be fabricated simultaneously using the same process flow. The capacitive sensor detected hydrogen at concentrations as low as 5 ppm without a heater. The thermal conductivity sensor measured high hydrogen concentrations and had a low power consumption of several tens of milliwatts. The integrated hybrid MEMS hydrogen sensor showed a high gas selectivity.

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“…Pd is also known to absorbs hydrogen, and this hydrogen absorption brings about a change in physical properties such as electric resistance and mechanical strain. 13 A number of hydrogen sensors have therefore been proposed that use the hydrogen absorption characteristic of Pd.…”

Section: Introductionmentioning

confidence: 99%

“…3 In this paper, we investgate PdCuSi in terms of applying it to capacitive MEMS hydrogen sensors. 13…”

Section: Introductionmentioning

confidence: 99%

A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

et al. 2018

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This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted Tshaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature. K E Y W O R D Scapacitive, hydrogen sensor, hydrogen society, MEMS, Pd-based metallic glass 2 SENSING FILMS Pd-based metallic glassPd has excellent hydrogen absorption characteristics but hydrogen is absorbed as a metal hydride, and as a result, the response to hydrogen is slow, and heat is required to release 70

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Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors

Cited by 29 publications

References 17 publications

High-Performance Nanostructured Palladium-Based Hydrogen Sensors—Current Limitations and Strategies for Their Mitigation

High-Performance Nanostructured Palladium-Based Hydrogen Sensors—Current Limitations and Strategies for Their Mitigation

Integrated hybrid MEMS hydrogen sensor with high sensitivity and high dynamic range

A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

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