2018
DOI: 10.1088/1361-6501/aad397
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Investigation of position detectors for atomic force microscopes

Abstract: This paper presents different possibilities of determination of cantilever deflection using the beam theory and finite element method. It is proved that the cantilever can be described as an elementary beam with the force point within the neutral fibre, and its deflection can be determined according to Euler–Bernoulli beam theory. The determined analytical relationship between the inclination angle of the cantilever beam and displacement of its end is used for further calculations of the output signal of the a… Show more

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Cited by 8 publications
(4 citation statements)
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“…Although AFM manufacturers have considered using optical interferometry, it is bulkier [1,4]. However, the sensitivity of an optical interferometer can be higher and has the advantage of traceability [5]. From a metrology point of view, the optical lever technique has many disadvantages, since it does not measure the cantilever displacement, but only the local angular deflection of the cantilever.…”
Section: Der Waalsmentioning
confidence: 99%
“…Although AFM manufacturers have considered using optical interferometry, it is bulkier [1,4]. However, the sensitivity of an optical interferometer can be higher and has the advantage of traceability [5]. From a metrology point of view, the optical lever technique has many disadvantages, since it does not measure the cantilever displacement, but only the local angular deflection of the cantilever.…”
Section: Der Waalsmentioning
confidence: 99%
“…Other researchers have investigated sensitivity of different detectors techniques for AFM applications such as an interferometer, optical lever, and focus sensor and compared each other. 29 Another method proposed the integration of metasurfaces positioned at the back of an AFM cantilever to improve the optical lever sensitivity. 30…”
Section: Introductionmentioning
confidence: 99%
“…By detecting the cantilever deflection together with the precalibration of its spring constant, the forces are quantified to serve as feedback signals for tip-sample distance control during scanning or to characterize many physical properties [27,28]. In most conventional AFM systems, the deflection is sensed by using the optical beam deflection technique [29]. A laser beam is focused on the back side of the cantilever near its free end and the reflected beam is monitored by a position sensitive photodetector (PSD).…”
Section: Introductionmentioning
confidence: 99%