2016
DOI: 10.1049/iet-pel.2015.0600
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Investigation of SiC trench MOSFET with floating islands

Abstract: The silicon carbide trench metal-oxide-semiconductor field-effect transistors (SiC UMOSFET) with P + floating island (FLI) which shields the gate oxide at the bottom of the gate trench from the high electric field during the blocking state and enhances the breakdown voltage (BV), is presented in this study using two-dimensional simulations. The effects of doping concentration, length and position of FLI on BV, electric field distribution and specific on-resistance (R on,sp) are studied, thereby providing parti… Show more

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Cited by 16 publications
(5 citation statements)
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“…This is more difficult in the trench device. Many different trench structures exist to protect the trench gate's bottom [77][78][79][80][81][82]. Another key motivator for SiC MOSFET innovation, in addition to enhancing electrical performance, is reliability.…”
Section: Sic Mosfetmentioning
confidence: 99%
“…This is more difficult in the trench device. Many different trench structures exist to protect the trench gate's bottom [77][78][79][80][81][82]. Another key motivator for SiC MOSFET innovation, in addition to enhancing electrical performance, is reliability.…”
Section: Sic Mosfetmentioning
confidence: 99%
“…If the electric field is larger than the critical value, the MOSFET will break down. Therefore, the structure and parameters need to be well designed [ 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 ]. Figure 1 b shows a schematic diagram of a MOSFET with three floating P-type structures.…”
Section: Structures Of Mosfetsmentioning
confidence: 99%
“…The simulation results show that the breakdown voltage of the MOSFET increases as the floating P-type structure becomes deeper in the epitaxial layer. By changing the depth of the floating P-type structure, the electric field extension is enhanced so that the breakdown voltage increases [ 20 , 21 , 22 ], as shown in Figure 2 . However, when the depth of the floating P-type structure exceeds 8 μm, as seen from the vertical electric field distribution, the electric field along the PN region shown in Figure 3 a and MOS region shown in Figure 3 b becomes uneven, leading to the slightly increasing breakdown voltage; this is because the distance between the structure and the P-well is too long.…”
Section: Influence Of Structure and Dopingmentioning
confidence: 99%
“…Among various SiC-based devices, as shown in Figure 1a, a 4H-SiC UMOSFET was preferred to provide a better tradeoff between breakdown voltage and on-resistance (R on ) than a planar VDMOSFET [6][7][8][9]. However, a UMOSFET has the disadvantage of a strong electric field in the bottom region of the gate, causing premature breakdown and oxide reliability problems.…”
Section: Introductionmentioning
confidence: 99%