Investigation of substrate temperature and cooling method on the properties of amorphous carbon films by hot-filament CVD with acetylene

Zhai, Zihao; Shen, Honglie; Chen, Jieyi; Jiang, Ye; Tang, Quntao

doi:10.1016/j.carbon.2017.03.006

Cited by 25 publications

(21 citation statements)

References 41 publications

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“…RMS roughness of carbon films with growth time of 30 s and 2 min were smaller relatively. The values were similar to the reported values by other technologies, such as direct current magnetron sputtering [ 19 ] and hot-filament chemical vapor deposition [ 17 ]. The difference was that the heat source was provided here directly by the flame for synthesis under normal pressure in this experiment.…”

Section: Resultssupporting

confidence: 89%

“…As seen in Table 2 , G peaks were located around 1590–1610 cm −1 , and D peaks were located around 1350–1360 cm −1 . In theory, these films were amorphous carbon films [ 17 ]. And G peaks FWHM were lager, which represented high levels of disorder in the carbon films [ 43 ].…”

Section: Resultsmentioning

confidence: 99%

“…When the growth time was more than 2 min, the carbon film surface became loose, and there were obvious island-like cluster structures appeared on the surface. It indicated the decrease of sp 3 bond in the films structures [ 17 ]. This was consistent with the results of previous Raman analysis.…”

Section: Resultsmentioning

confidence: 99%

“…They were amorphous and microcrystal carbon films composed of C with sp 2 and sp 3 hybridization [ 16 ]. By adjusting the ratio of the content of sp 2 and sp 3 bonds, carbon films could be obtained with different properties [ 17 ]. For example, amorphous carbon films having a significant fraction of C–C sp 3 bonds generally exhibited high hardness, large optical gap and high resistivity [ 18 , 19 ].…”

Section: Introductionmentioning

confidence: 99%

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Synthesis of Amorphous Carbon Film in Ethanol Inverse Diffusion Flames

Zhu

Liu

et al. 2018

Nanomaterials

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Recently, carbon nanomaterials have attracted significant attention due to their remarkable physical and chemical properties. The preparation methods and applications of the carbon nanomaterials have developed rapidly. In this study, the flame synthesis of amorphous carbon film grown on copper foil in an ethanol inverse diffusion flame was presented. The effects of ethanol flow rate, the copper foil location in flame and growth time were investigated in detail. The growth status of the synthetic amorphous carbon film was analyzed by an optical microscope and HRTEM (high resolution transmission electron microscope). Raman spectroscopy and XRD (X-ray diffraction) were used to characterize the structure of the carbon film. The roughness of the carbon film was determined by AFM (atomic force microscopy). As the ethanol flow rate increased and the copper foil moved upwards in the flame, the area of the synthetic amorphous carbon film increased. The roughness of carbon films with the growth time of 30 s and 2 min were smaller. In addition, the synthetic amorphous carbon film exhibited a certain degree of flexibility and visual transparency. Through the study, a reference could be provided to find the optimum condition for the flame synthesis of satisfactory amorphous carbon film. For these experiments, when the ethanol flow rate reached 2 mL/min, the copper foil was located on the top of the flame and the growth time was 2 min, an amorphous carbon film with higher quality could be obtained.

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Section: Resultssupporting

confidence: 89%

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Synthesis of Amorphous Carbon Film in Ethanol Inverse Diffusion Flames

Zhu

Liu

et al. 2018

Nanomaterials

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“…The characteristic of HFCVD is that the catalytic role of the metallic substrate in decomposing the hydrocarbon precursors is taken over here by the heated filament that promotes the dissociation of gas carbon source and therefore the graphene films grown directly on glass at reduced temperatures could be achieved. Compared with PECVD and ECRCVD, HFCVD has some unique merits, including high deposition rate, easily handled substrate, and no damaging bombardment of energetic ions. , Although the decomposition ability problems can be resolved by either the filament in HFCVD or the plasma in PECVD and ECRCVD, it has been discovered that the films deposited on glass at reduced substrate temperatures by these methods still remain amorphous. − …”

Section: Introductionmentioning

confidence: 99%

Evolution of Structural and Electrical Properties of Carbon Films from Amorphous Carbon to Nanocrystalline Graphene on Quartz Glass by HFCVD

Zhai

Shen

Chen

et al. 2018

ACS Appl. Mater. Interfaces

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Direct growth of graphene films on glass is of great importance but has so far met with limited success. The noncatalytic property of glass results in the low decomposition ability of hydrocarbon precursors, especially at reduced temperatures (<1000 °C), and therefore amorphous carbon (a-C) films are more likely to be obtained. Here, we report the hydrogen influence on the structural and electrical properties of carbon films deposited on quartz glass at 850 °C by hot-filament chemical vapor deposition (HFCVD). The results revealed that the obtained a-C films were all graphitelike carbon films. Structural transition of the deposited films from a-C to nanocrystalline graphene was achieved by raising the hydrogen dilution ratios from 10 to over 80%. On the basis of systematic structural and chemical characterizations, a schematic process with three steps including sp chain aggregation, aromatic ring formation, and sp bond etching was proposed to interpret the structural evolution. The nanocrystalline graphene films grown on glass by HFCVD exhibited good electrical performance with a carrier mobility of 36.76 cm/(V s) and a resistivity of 5.24 × 10 Ω cm over an area of 1 cm. Temperature-dependent electrical characterizations revealed that the electronic transport in carbon films was dominated by defect, localized, and extended states, respectively, when increasing the temperature from 75 to 292 K. The nanocrystalline graphene films presented higher carrier mobility and lower carrier concentration than those of a-C films, which was mainly attributed to their smaller conductive activation energy. The present investigation provides an effective way for direct growth of graphene films on glass at reduced temperatures and also offers useful insights into the understanding of structural and electrical relationship between a-C and graphene.

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Amorphous Carbon Films for Electronic Applications

et al. 2022

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While various crystalline carbon allotropes, including graphene, have been actively investigated, amorphous carbon (a‐C) thin films have received relatively little attention. The a‐C is a disordered form of carbon bonding with a broad range of the CC bond length and bond angle. Although accurate structural analysis and theoretical approaches are still insufficient, reproducible structure–property relationships have been accumulated. As the a‐C thin film is now adapted as a hardmask in the semiconductor industry and new properties are reported continuously, expectations are growing that it can be practically used as active materials beyond as a simple sacrificial layer. In this perspective review article, after a brief introduction to the synthesis and properties of the a‐C thin films, their potential practical applications are proposed, including hardmasks, extreme ultraviolet (EUV) pellicles, diffusion barriers, deformable electrodes and interconnects, sensors, active layers, electrodes for energy, micro‐supercapacitors, batteries, nanogenerators, electromagnetic interference (EMI) shielding, and nanomembranes. The article ends with a discussion on the technological challenges in a‐C thin films.

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Investigation of substrate temperature and cooling method on the properties of amorphous carbon films by hot-filament CVD with acetylene

Cited by 25 publications

References 41 publications

Synthesis of Amorphous Carbon Film in Ethanol Inverse Diffusion Flames

Synthesis of Amorphous Carbon Film in Ethanol Inverse Diffusion Flames

Evolution of Structural and Electrical Properties of Carbon Films from Amorphous Carbon to Nanocrystalline Graphene on Quartz Glass by HFCVD

Amorphous Carbon Films for Electronic Applications

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