Investigation of subsurface damages and surface roughness in grinding process of Zerodur® glass–ceramic

Esmaeilzare, Amir; Rahimi, Abdolreza; Rezaei, Seyed Mehdi

doi:10.1016/j.apsusc.2014.05.137

Cited by 125 publications

(67 citation statements)

References 21 publications

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“…Meanwhile, the subsurface micro cracks' length may also be considered as an index of the SSD magnitude to a certain extent. In addition, the effects of grinding parameters on the micro crack's length are in accordance with the existing research results about how grinding parameters influence the depth of SSD and surface roughness [10,11,13,15]. Figures 4b, 5b, 6b, and 7b show that the maximum angle, the average angle, and the minimum angle are all not affected by the change of average abrasive size, grinding force, grinding wheel speed, and grinding depth, respectively.…”

Section: The Influence Of Grinding Parameters On Micro Cracks' Characsupporting

confidence: 72%

“…Chen et al put forward a new model of describing the relationship between surface roughness and SSD, and by mathematical simulation with the model, they presented the influence of grinding depth, feed rate, wheel speed, and other grinding process parameters on the SSD and surface roughness [10]. In the work of Esmaeilzare, a cup diamond wheel was used to grind the specimens made of Zerodur, in order to study how the grinding parameters influence SSD and surface roughness [11]. By analyzing the grinding characteristics, surface integrity, and material removal mechanisms when grinding the surface of SiC with a diamond wheel, Agarwal studied the impact of grinding state on the damage surface/subsurface [12].…”

Section: Introductionmentioning

confidence: 99%

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Relationship between grinding process and the parameters of subsurface damage based on the image processing

Wang

Hong-feng

et al. 2015

Int J Adv Manuf Technol

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Grinding is the main process step for the highprecision optical components, and its process parameters may bring forth subsurface damage to some degrees on the surfaces and finally result in the variation of the mechanical and optical properties of the components. In this paper, the ground sample is etched to expose the micro cracks and the characterization parameters of the subsurface damage are extracted using the image processing method. To investigate the influence of main grinding parameters on the micro cracks of subsurface damage, relationships among the average abrasive size, grinding force, wheel speed, and grinding depth and characterization parameters (length, angle, and density) of micro cracks are established. The results show that the influence of grinding parameters on the micro crack's length is consistent with that on the surface roughness. The average abrasive size and grinding force have obvious influence on the subsurface damage and surface roughness than wheel speed and grinding depth. Micro cracks' angle and density are almost not affected by the grinding parameters.

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Section: The Influence Of Grinding Parameters On Micro Cracks' Characsupporting

confidence: 72%

Section: Introductionmentioning

confidence: 99%

Relationship between grinding process and the parameters of subsurface damage based on the image processing

Wang

Hong-feng

et al. 2015

Int J Adv Manuf Technol

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“…Perveen et al demonstrated the same phenomenon for micro grinding of BK7 glass [7]. Esmaeilzare et al found that when rough grinding Zerodur glass, SSD depth increases when the grinding wheel rotation speed decreases [8]. For the third grinding mode (Fig.…”

Section: Introductionmentioning

confidence: 56%

Subsurface mechanical damage during bound abrasive grinding of fused silica glass

Blaineau

Debenath

Laheurte

et al. 2015

Applied Surface Science

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“…In this study, subsurface damages of ground SiC samples were investigated by magnetorheological finishing (MRF) spot technique [25], which is less destructive and more efficient in measurement of subsurface damages compared with ball dimpling [26] and tapering methods [27]. Typical subsurface damages involved in the MRF spot are observed using the SEM.…”

Section: Subsurface Damagesmentioning

confidence: 99%

High-performance grinding of a 2-m scale silicon carbide mirror blank for the space-based telescope

Zhang

Yang

Zheng

et al. 2016

Int J Adv Manuf Technol

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Silicon carbide (SiC) is a competitive candidate material for building the space-based reflecting mirrors. However, SiC is also a typical difficult-to-machine material due to its extreme hardness. When SiC workpiece is machined by grinding, the wheel wears rapidly which leads to a deterioration of surface form accuracy. Grinding efficiency also becomes extremely low due to the frequent truing and dressing of grinding wheels. To achieve high-performance grinding process capable of producing accurate surface at high grinding efficiency, an ultrasonic vibration-assisted fix-point grinding technology was developed in this study. Wheel wear observation indicated that the wheel needs not to be dressed during the whole grinding cycle. Moreover, a laser tracker was used to achieve an on-machine measurement of the surface form error. A CNC tool microset was adopted to evaluate the wheel wear amount. On the basis of the above two results, surface form error could be predicted before grinding, and thus, an inprocess compensation of surface form error was carried out. Using the above-mentioned grinding strategies, a SiC mirror blank with an aperture diameter of 2 m was successfully ground to a form accuracy of 18 μm in peak-to-valley (PV). Therefore, this work provides an efficient and economical solution for grinding the large-scale SiC aspherical surfaces.

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Investigation of subsurface damages and surface roughness in grinding process of Zerodur® glass–ceramic

Cited by 125 publications

References 21 publications

Relationship between grinding process and the parameters of subsurface damage based on the image processing

Relationship between grinding process and the parameters of subsurface damage based on the image processing

Subsurface mechanical damage during bound abrasive grinding of fused silica glass

High-performance grinding of a 2-m scale silicon carbide mirror blank for the space-based telescope

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