Investigation of surface characteristics evolution and laser damage performance of fused silica during ion-beam sputtering

Xu, Mingjin; Dai, Yifan; Zhou, Lin; Shi, Feng; Wan, Wen‐Ming; Xie, Xuhui; Sui, Tingting

doi:10.1016/j.optmat.2016.03.034

Cited by 24 publications

(4 citation statements)

References 27 publications

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“…Where An and Bn represent stochastic variables that follow the U[0, 2π] distribution; Cn is assigned a value of 6 to satisfy the specified requirements for the roughness of fused silica 27,28 ; Ds denotes the fractal dimension within the interval of (2, 3); The parameter γ takes on a value of 1.5, and n denotes the quantity of natural sequences.…”

Section: Surface Roughness Modeling Of Fused Silicamentioning

confidence: 99%

Influence of surface roughness on interfacial adsorption and laser ablation mechanisms of organic contaminants on fused silica

Wang,

Bai,

Guo

et al. 2023

Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers

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Section: Surface Roughness Modeling Of Fused Silicamentioning

confidence: 99%

Influence of surface roughness on interfacial adsorption and laser ablation mechanisms of organic contaminants on fused silica

Wang,

Bai,

Guo

et al. 2023

Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers

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“…As the most ideal optical element material, fused silica has many excellent properties, which is less affected by temperature in ultra-precision machining [2,3]. Which are widely used as transparency optics for high power output systems [4]. It is also an ideal material for high-performance optical devices [5,6].…”

Section: Introductionmentioning

confidence: 99%

Theoretical basis and performance research on advanced non-contacting ion beam manufacturing process for optical materials

Li,

DasenWang,

Yang

et al. 2023

J. Phys.: Conf. Ser.

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Ultra-smooth surface is very important for the performance of high energy optical system in the defence field. Low quality optical elements will cause energy loss and affect the performance of the optical system. Ultra-precision manufacturing technology of optical components is the key technology to obtain high quality optical components. As an advanced ultra-precision and no-contact surface processing technology, Ion Beam Manufacturing (IBM) was studied. Based on the analysis of the relationship between the ion beam current density distribution parameters obtained by faraday scan and the removal function, more effective removal function calculation method was found, the removal function model for IBF fused silica was established. The Molecular Dynamics(MD)simulation to study interaction between incident ion and optical substrate. Ion particle motion behaviour were obtained under different incident energies. The effect of incidence angle on surface roughness were carried out, lower surface roughness by smaller angle incident, ultra-precision surface of optical components were obtained by IBF experiments.

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“…However, when exposed to high fluences in the ultra violet range, some defects on the fused silica will evolve into damage precursor induced laser damage, which make the lifetime of fused silica decreases rapidly [3,4]. Subsurface damage (SSD) including surface microcracks and scratches are typical precursors for laser induced damage [3][4][5][6]. In order to withstand the irradiation of high-power laser, it is necessary to avoid SSD as much as possible in the machining technologies for fused silica.…”

Section: Introductionmentioning

confidence: 99%

Experimental study on surface integrity and subsurface damage of fused silica in ultra-precision grinding

Zhong

Dai

Xiao

et al. 2021

Int J Adv Manuf Technol

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To realize low-damage ultra-precision grinding on fused silica, the surface quality and subsurface damage (SSD) distribution with fine-grained grinding wheel under different depth-of-cut and cutting speed are experimentally studied. The material removal mechanism under different grinding parameters is revealed by calculating undeformed chip thickness and observed with the help of transmission electron microscopy. The results show that brittleductile surfaces and ductile-like surfaces are generated during grinding. With the decrease of depth-of-cut and the increase of wheel cutting speed, the ultra-precision grinding changes to ductile-regime grinding with plastic flow removal. Besides, the surface roughness (SR) and SSD depth are reduced. The fracture defects such as fractured pits and grinding streaks on brittle-ductile surface gradually decrease. Instead, a ductile-like surface covered with grinding streaks is found. On brittle-ductile surfaces, the nonlinear relationship SSD∝SR 4/3 is no longer proper under the influence of plastic flow. Using surface roughness Ra to predict SSD depth is more accurate. When depth-of-cut is 1 μm, cutting speed is 23.4 m/s and the material removal mode is dominated by plastic flow removal, the surface Ra is improved to 2.0 nm and there is no crack but only a 3.4 nm deep plastic flow layer in subsurface after grinding.

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Investigation of surface characteristics evolution and laser damage performance of fused silica during ion-beam sputtering

Cited by 24 publications

References 27 publications

Influence of surface roughness on interfacial adsorption and laser ablation mechanisms of organic contaminants on fused silica

Influence of surface roughness on interfacial adsorption and laser ablation mechanisms of organic contaminants on fused silica

Theoretical basis and performance research on advanced non-contacting ion beam manufacturing process for optical materials

Experimental study on surface integrity and subsurface damage of fused silica in ultra-precision grinding

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