Investigation of surface morphology of SiC during SIMS analysis

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

“…A paper by Fukumoto and co-workers investigated the surface morphology of silicon carbide that was bombarded by caesium ions under various conditions. 363 At a high angle of incidence, the surface was found to become more rough and this led to a greater change in secondary ion intensities. In addition, the secondary ion intensities changed even at a depth of less than several hundred nanometers.…”