Investigation of Temperature Characteristics and Substrate Influence on AlScN-Based SAW Resonators

Ding, Anli; Reusch, Markus; Lu, Yuan; Kurz, Nicolas; Lozar, Roger; Christoph, Tim; Driad, R.; Ambacher, O.; Žukauskaitė, Agnė

doi:10.1109/ultsym.2018.8579751

Cited by 10 publications

(5 citation statements)

References 36 publications

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“…acoustic wave devices [3]. Relatively high piezoelectric coefficients and thermal stability give AlScN advantage compared to perovskite-type piezoelectrics and piezoelectric polymers, which usually lose piezoelectric properties at high temperatures.…”

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confidence: 99%

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Bespalova

Österlund

Ross

et al. 2021

J. Microelectromech. Syst.

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Scandium-alloyed aluminum nitride (AlScN) is a potential material for micro-electromechanical systems because of its unique advantages, such as strong piezoelectric effect and high thermal stability. However, issues related to its stability and interaction with other materials in multilayer systems require investigation. The formation of new phases at the interface between piezomaterial and electrode material can lead to the device failure. In this study, multilayer structures Si substrate/AlN/Ti-Mo/Al 0.8 Sc 0.2 N/top electrode (TE) were studied after annealing at a wide range of temperatures and durations. Four different TE materials (i.e. Al, AlSi (1%), Mo/Al, and Mo) were examined to determine the most reliable electrode material for the structure. The phase stability, interfacial quality, and piezoelectric response of the multilayer systems after thermal annealing were investigated. The structure with Mo TE layer was stable after annealing at 800 • C for 300 h and at 1000 • C for 100 h. None of the structures formed any new phases at the interface between the electrode layer and AlScN. The transverse piezoelectric coefficient (e 31,f) was determined for Al 0.8 Sc 0.2 N before and after annealing. The absolute value of the e 31,f was −1.39 C/m 2 for as-deposited structure and −1.67 C/m 2 for the same structure annealed for 300 h at 800 • C.

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confidence: 99%

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Bespalova

Österlund

Ross

et al. 2021

J. Microelectromech. Syst.

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“…According to the rocking curve inset in Figure 4a, the FWHM of the Al 0.56 Sc 0.44 N ð1120Þ peak is only 0.4°, indicating the superior crystal property. The FWHM is smaller than the result reported by Ding et al [14] and to our knowledge, it is the best value reported for the AlScN a-plane Al 0.77 Sc 0.23 N [13] r-plane Al 2 O 3 1.75°1.71 2.4 538 a-plane Al 0.7 Sc 0.3 N [24] r-plane Al 2 O 3 À 0.95 3.7 1090 c-plane Al 0.63 Sc 0.27 N [25] Silicon (001) 0.36°0.294 2.2 À c-plane Al 0.88 Sc 0.12 N [26] Silicon (001) 1.2°3.648 3.7 146 c-plane Al 0.77 Sc 0.23 N [13] c-plane Al 2 O 3 -1.91 1.3 659 c-plane Al 0.68 Sc 0.32 N [27] Silicon (001) -1.83 2.6 -resonators with different electrode materials. The test results show that the SAW resonator with a Pt electrode achieved a high mechanical coupling, significantly outperforming that of SAW resonators based on a c-axis oriented AlScN films (Table 1).…”

Section: Resultsmentioning

confidence: 99%

Theoretical and Experimental Study of High‐Electromechanical‐Coupling Surface Acoustic Wave Resonators Based on A‐Plane (112¯0)$\left(\right. 11 \overset{\cdot}{2} 0 \left.\right)$ Al_0.56Sc_0.44N Films

Xie,

Xuan,

et al. 2024

Physica Rapid Research Ltrs

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Herein, a high‐quality Al0.56Sc0.44N piezoelectric thin‐film‐based surface acoustic wave (SAW) resonator is developed. The Al0.56Sc0.44N is deposited on r‐plane Al2O3 substrate by reactive magnetron sputtering. X‐ray diffraction (XRD) spectroscopy shows that the grown Al0.56Sc0.44N films are single‐phased and a‐plane oriented. The full width at half maximum of the XRD rocking curve is only 0.4°, which is smaller than most of the reported values. The effects of normalized thickness of the piezoelectric layer, electrode materials, and thickness on acoustic properties of the SAW resonators are investigated through the 3D finite‐element method equipped with the hierarchical cascading technique. A monotonically decreasing resonant frequency can be obtained with the mass loading of both the electrode metals. For the devices with a Pt electrode, it is observed that the electromechanical coupling coefficient () exhibits a nonlinear characteristic of first increasing and then decreasing with the increase of electrode thickness. SAW resonators with a nonpolar a‐plane Al0.56Sc0.44N thin films are fabricated, showing an exceptionally high of 4.6%. This result demonstrates a significant potential of AlScN films with the a‐plane orientation in radio frequency application.

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“…As the manufacturing of temperature sensors on ScAlN is a fresh topic, up to now, only a few papers are focused on the Sezawa and Lamb propagation modes [7,13] and on the temperature behavior of the SAW structures [14]. The resonance frequency shift versus temperature of a SAW resonator is used as a mechanism for temperature measurements for ScAlN/Si SAW sensors.…”

Section: Introductionmentioning

confidence: 99%

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc₀.₃Al₀_.₇N/Si^†

Nicoloiu,

Boldeiu,

Nastase

et al. 2024

IEEJ Transactions Elec Engng

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GHz operating single port SAW resonators have been manufactured on Sc0.3Al0.7N/Si substrate. The thickness of the ScAlN thin layer was 0.8 μm. Advanced nano‐lithographic techniques have been developed for devices manufacturing. Rayleigh and Sezawa modes have been evidenced on Sc0.3Al0.7N/Si structure. The targeted applications are temperature sensors for harsh environmental operations. The sensitivity and temperature coefficient of frequency (TCF) of the manufactured devices have been experimentally determined and analyzed. The mode shapes of the resonances that appear in the devices supported on Sc0.3Al0.7N/Si substrate were evidenced by finite element method (FEM) simulations. A technique that combines FEM with Coupling of Modes (COM) was used for the determination of the resonance frequencies. Simulations performed for the temperature dependence of the resonance frequency led to results close to the experimental ones for the Rayleigh mode as well as for the Sezawa mode for devices supported on Sc0.3Al0.7N/Si substrate. © 2024 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.

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Investigation of Temperature Characteristics and Substrate Influence on AlScN-Based SAW Resonators

Cited by 10 publications

References 36 publications

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Theoretical and Experimental Study of High‐Electromechanical‐Coupling Surface Acoustic Wave Resonators Based on A‐Plane (112¯0)$\left(\right. 11 \overset{\cdot}{2} 0 \left.\right)$ Al_0.56Sc_0.44N Films

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc₀.₃Al₀_.₇N/Si^†

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Investigation of Temperature Characteristics and Substrate Influence on AlScN-Based SAW Resonators

Cited by 10 publications

References 36 publications

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Theoretical and Experimental Study of High‐Electromechanical‐Coupling Surface Acoustic Wave Resonators Based on A‐Plane (112¯0)$\left(\right. 11 \overset{\cdot}{2} 0 \left.\right)$ Al0.56Sc0.44N Films

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc0.3Al0.7N/Si†

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Theoretical and Experimental Study of High‐Electromechanical‐Coupling Surface Acoustic Wave Resonators Based on A‐Plane (112¯0)$\left(\right. 11 \overset{\cdot}{2} 0 \left.\right)$ Al_0.56Sc_0.44N Films

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc₀.₃Al₀_.₇N/Si^†