Investigation of the densification mechanisms and corrosion resistance of amorphous silica films

Ponton, Simon; Dhainaut, Franck; Vergnes, Hugues; Samélor, Diane; Sadowski, Daniel C.; Rouessac, V.; Lecoq, Hélène; Sauvage, Thierry; Caussat, Brigitte; Vahlas, Constantin

doi:10.1016/j.jnoncrysol.2019.04.005

Cited by 30 publications

(24 citation statements)

References 70 publications

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“…This densification can be explained by high energy ions bombardment that yields an increase of the film compactness [83] - [84]. The film densification outcome is consistent with previous studies showing that CVD [85] - [86], IAD [87] and sputtering process [88] yield densified silica coatings. Therefore, our approach based on probing the microstructure by spectroscopic tools reveals the densification features of silica films and offers interesting perspectives to better characterize the layer structure.…”

Section: Structural Understanding Of the Sputtered Silica Filmsupporting

confidence: 89%

Structural analysis of sputtered amorphous silica thin films: A Raman spectroscopy investigation

et al. 2021

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In this work, a structural characterization of sputtered silica films was carried out using Raman spectroscopy. Due to the low cross-section and the thinness of the silica layer, its Raman signature is dwarfed by that of the glass substrate and is therefore difficult to extract.Overcoming these limitations represents an experimental challenge and requires the development of specific analysis strategies. For this purpose, an integrated approach for extracting and interpreting the Raman signature of amorphous silica films deposited on a soda-lime glass substrate was developed, based on three distinct methods: delamination of the sputtered silica film, creating a reflective mask substrate by depositing a metallic silver coating on the glass substrate and applying a numerical signal analysis (Non-negative matrix factorization) to the multidimensional dataset acquired through depth profile acquisitions on silica films directly deposited on a glass substrate. The reliability of each proposed method is demonstrated for the extraction of the silica thin film Raman spectra. These various methods can be easily extended to other materials, either crystalline or amorphous. Furthermore, we discuss the advantages and the limits of each approach.Applying this methodology allowed us to highlight the structural differences between sputtered silica thin film and bulk vitreous silica glass (v-SiO2). Magnetron sputtering film deposition is shown to form dense silica glass layers, with an estimated densification ratio, 2 measured by x-ray reflectivity, equal to 7%. At the medium distance range, the network connectivity change in v-SiO2 is expressed by an unusually high population of three-membered rings leading to a more compact structure. The short-range order transformation was also studied by deriving the intertetrahedral angle decrease. The present results could be a step towards advanced investigation to gain insights into the structure of films at the atomic level.

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Section: Structural Understanding Of the Sputtered Silica Filmsupporting

confidence: 89%

Structural analysis of sputtered amorphous silica thin films: A Raman spectroscopy investigation

et al. 2021

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“…The increase in TO4 peak can be mainly explained by the formation of a glassy‐like coatings containing a significant amount of defects (pores, nonstoichiometry, or contaminants such as C or N). [ 31 ]…”

Section: Resultsmentioning

confidence: 99%

Single‐step deposition of hexamethyldisiloxane surface gradient coatings with a high amplitude of water contact angles over a polyethylene foil

Malekzad

Gallingani

Barletta

et al. 2020

Plasma Processes & Polymers

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One interesting category of nano‐ and micro‐engineered surfaces is surface gradients, which allow the controlled optimization of biointerfaces at a small scale in an extended area length. Plasma coatings offer a large diversity of functionalities at the nanoscale, accompanied by high chemical stability and adhesion on a variety of substrates at ambient temperature. Atmospheric‐pressure plasma‐assisted deposition could be employed for the generation of surface gradients on thermosensitive materials. In this study, a corona plasma jet is used to deposit polydimethylsiloxane/SiO2‐like surface gradients on polyethylene foil by varying the O2 concentration in the discharge during the movement of the plasma source. We obtained, in a single‐step approach, gradient coatings along a length of ∼10 cm, with a gradual variation of both chemistry and surface energy.

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“…For instance, multiple reactions take place simultaneously in the process, making it difficult to extract information from experimental procedures [ 20 ]. To date, many studies have attempted to elucidate the influence of precursors on the hydrolysis, condensation reactions, and crosslinking by applying different characterization and analysis techniques, including gas chromatography (GC) [ 21 ], nuclear magnetic resonance 29 Si NMR [ 22 , 23 ], Raman spectroscopy [ 24 ], and Fourier transform infrared spectroscopy (FTIR) [ 25 , 26 ]. Among these approaches, FTIR not only provides complementary information on the bonds and structures formed during the synthesis process but also, when combined with deconvolution methods, yields valuable data on the microstructure of siliceous materials [ 27 , 28 , 29 ].…”

Section: Introductionmentioning

confidence: 99%

Hybrid Xerogels: Study of the Sol-Gel Process and Local Structure by Vibrational Spectroscopy

et al. 2021

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The properties of hybrid silica xerogels obtained by the sol-gel method are highly dependent on the precursor and the synthesis conditions. This study examines the influence of organic substituents of the precursor on the sol-gel process and determines the structure of the final materials in xerogels containing tetraethyl orthosilicate (TEOS) and alkyltriethoxysilane or chloroalkyltriethoxysilane at different molar percentages (RTEOS and ClRTEOS, R = methyl [M], ethyl [E], or propyl [P]). The intermolecular forces exerted by the organic moiety and the chlorine atom of the precursors were elucidated by comparing the sol-gel process between alkyl and chloroalkyl series. The microstructure of the resulting xerogels was explored in a structural theoretical study using Fourier transformed infrared spectroscopy and deconvolution methods, revealing the distribution of (SiO)4 and (SiO)6 rings in the silicon matrix of the hybrid xerogels. The results demonstrate that the alkyl chain and the chlorine atom of the precursor in these materials determines their inductive and steric effects on the sol-gel process and, therefore, their gelation times. Furthermore, the distribution of (SiO)4 and (SiO)6 rings was found to be consistent with the data from the X-Ray diffraction spectra, which confirm that the local periodicity associated with four-fold rings increases with higher percentage of precursor. Both the sol-gel process and the ordered domains formed determine the final structure of these hybrid materials and, therefore, their properties and potential applications.

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Investigation of the densification mechanisms and corrosion resistance of amorphous silica films

Abstract: OATAO is an open access repository that collects the work of some Toulouse researchers and makes it freely available over the web where possible.

Cited by 30 publications

References 70 publications

Structural analysis of sputtered amorphous silica thin films: A Raman spectroscopy investigation

Structural analysis of sputtered amorphous silica thin films: A Raman spectroscopy investigation

Single‐step deposition of hexamethyldisiloxane surface gradient coatings with a high amplitude of water contact angles over a polyethylene foil

Hybrid Xerogels: Study of the Sol-Gel Process and Local Structure by Vibrational Spectroscopy

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