Investigation of the effect of metallization ratio and side shift on the interdigitated electrodes performance for biochemical sensing

Deshpande, Shreyas; Bhand, Sunil; Bacher, Gautam

doi:10.1007/s10800-021-01549-x

Cited by 10 publications

(5 citation statements)

References 24 publications

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“…In our work, we summarized the measured C 0 versus η with different P in figure 5(c). It is clear C 0 with different P shows great distinction: the raising rate of C 0 remarkably slows down with increasing P. Furthermore, FEM is utilized to simulate C 0 with different P and η in figure 5(d) [28,29]. It can be seen that C 0 with different P demonstrate different increasing trends versus η, which is consistent with the measured results shown in the overlap figure in figure 5(e).…”

Section: Resultssupporting

confidence: 79%

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Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO₃ membrane-based laterally-excited bulk acoustic resonator

Zhou

Fan

Tong

et al. 2023

J. Micromech. Microeng.

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The laterally-excited bulk acoustic resonators (XBARs) have been gaining attention for their ability to fabricate super high frequency (>5 GHz) and wide fractional bandwidth filters recently. However, the limited cognition about the resonant characteristics of XBARs remains an obstacle for its commercial application. In this paper, the influence of electrode pitch (P) on resonant frequency (fres ), quality factor (Q) and effective electromechanical coupling coefficient (K2 eff ) in X-cut LiNbO3 membrane-based resonators are investigated for both the XBAR mode and first-order asymmetry mode (A1 ). The XBAR mode with fres above 8 GHz was excited at a metallization ratio (η) less than 0.5 when P was within 5 μm to 10 μm, as well as η less than 0.6 when P was within 15 μm to 20 μm. Meanwhile, we revealed that increasing P had a robust effect on the fres of XBAR mode but did produce an improvement on its K2 eff and Q. In contrast, both fres and Q of the A1 mode gradually declined with increasing P. In addition, we have proposed a ratio (C' 0 /Cnum ) as a function of η, varying with P, to achieve a more accurate prediction of capacitance behavior in resonators. Overall, this research has demonstrated the sophisticated resonant and capacitive properties of X-cut membrane-based resonators for the first time, which paved the way for the fabrication of high-performance filters.

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Section: Resultssupporting

confidence: 79%

“…It is clear in the equations ( 3)-( 5) that the independent variable k is only related to η, and the capacitance C 0 calculated by the numerical method as a function of η is shown on the left of figure 5(f) [28][29][30]. For 0 < η < 0.2, C 0 has a slight rise, then it turns a nearly linear increase at 0.2 < η < 0.8.…”

Section: Resultsmentioning

confidence: 98%

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO₃ membrane-based laterally-excited bulk acoustic resonator

Zhou

Fan

Tong

et al. 2023

J. Micromech. Microeng.

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“…1f) and total electric energy of 4.4 x 10 -9 J (Fig. 1g) are detected at the WE, which influences the output response of the fabricated device [21].…”

Section: A Comsol Simulationmentioning

confidence: 95%

Disposable pH Sensor on Paper Using Screen-Printed Graphene-Carbon Ink Modified Zinc Oxide Nanoparticles

et al. 2022

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Estimation of pH is vital to assess the biochemical and biological processes in a wide variety of applications ranging from water to soil, health, and environment monitoring. This work reports a screen-printed flexible and disposable pH sensor using the impedimetric method. The pH sensor was fabricated by screen printing Graphene-Carbon modified Zinc Oxide based active layer on a paper substrate and shows nearly three orders of change in impedance magnitude in the pH range of 2 -9. The sensor was carefully designed using COMSOL® Multiphysics software to understand the influence of electrode geometry and the electrical potential developed across the structure. The developed sensor was used for pH monitoring of soil and exhibited high sensitivity of 5.27 kΩ /pH (2-8) with a correlation coefficient (R 2 ) of 0.99. Finally, an IoT-enabled smart pH detection system was implemented for continuous pH monitoring for potential application in digital agriculture. The outcome demonstrates that the presented flexible and disposable pH sensor could open new opportunities for monitoring of water, product process, human health, and chemical (or bio) reactions even using small volumes of samples.

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“…The COMSOL Multiphysics model used in this study was built in a 3D structural mechanics module. Based on the study in reference [ 20 ], the metal ratio (a/p) was determined to be 50%. The gap length between the IDT and the reflectors was set to the width of one finger by default.…”

Section: Theory and Simulationmentioning

confidence: 99%

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

Liu,

Wang,

Zhang

et al. 2023

Sensors

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Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes.

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Investigation of the effect of metallization ratio and side shift on the interdigitated electrodes performance for biochemical sensing

Cited by 10 publications

References 24 publications

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO₃ membrane-based laterally-excited bulk acoustic resonator

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO₃ membrane-based laterally-excited bulk acoustic resonator

Disposable pH Sensor on Paper Using Screen-Printed Graphene-Carbon Ink Modified Zinc Oxide Nanoparticles

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

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Investigation of the effect of metallization ratio and side shift on the interdigitated electrodes performance for biochemical sensing

Cited by 10 publications

References 24 publications

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator

Disposable pH Sensor on Paper Using Screen-Printed Graphene-Carbon Ink Modified Zinc Oxide Nanoparticles

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

Contact Info

Product

Resources

About

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO₃ membrane-based laterally-excited bulk acoustic resonator

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO₃ membrane-based laterally-excited bulk acoustic resonator