PEDRAM ET AL. | 9 of 13 J ¼ 1:74 À 0:19a À 0:56B þ 0:14C À 0:14AB À 0:11BC þ 0:18A 2 þ 0:21B 2 þ 0:22C 2 β ¼ 16:68 þ 1:94A þ 4:24B À 1:13C þ 2:00AB À 1:94A 2 À 1:74B 2 À 2:79C 2 where A, B, and C represent deposition duration, gas pressure, and discharge power, respectively. The analysis of variance (ANOVA) was performed to indicate the significance of the developed model. The Pvalues for all responses are less than 0.0001 denoting that the models are absolutely significant. The calculated R 2 coefficients, which are measures of the variation amount around the mean value, were found to be 0.9951 and 0.9923 for permeation flux and separation factor, respectively.