Investigation of the microstructure and characterizations of TiN/CrN nanomultilayer deposited by unbalanced magnetron sputter process

Su, Chung-Yen; Pan, C. T.; Liou, Tai Pin; Chen, Po Ta; Lin, Chung Kwei

doi:10.1016/j.surfcoat.2008.05.057

Cited by 26 publications

(14 citation statements)

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“…The Pre-treatment of carbide inserts insertion in the process chamber consisted of: a preliminary ultrasonic cleaning (at 18~20 kHz operating frequency) in a hot alkaline solution; a subsequent washing with acetone and alcohol, drying and rubbing. The cleaned sample inserts were placed in special containers that are installed in the VIT-2 process chamber on a special table (14), which had a rotary and planetary motion during the coating deposition process.…”

Section: Coating Depositionmentioning

confidence: 99%

“…Coatings may have multiple physical purposes; on the one hand, the coating in spite of its tiny thickness (few micrometers), improves substrate properties such as surface hardness, physical-chemical passivity towards workpiece material, antifriction and thermal insulation. On the other hand, during the cutting process, the coating transforms the contact characteristics such as adhesion interaction, friction and inter-diffusion between workpiece and tool materials [1,3,8,[13][14][15][16]. The reduction of these characteristics allows lowering stresses (normal and shear), frictional heat capacity and thermal stresses acting at the contact areas of tool.…”

Section: Introductionmentioning

confidence: 99%

“…By varying their deposition parameters, it is possible to control the composition, structure and morphology along with the thickness and number of layers in the coating. With this approach the hardness of the coatings can reach 45-50 GPa [10][11][12][13][14]. The coatings retain an appreciably high viscosity because they dissipate the brittle fracture energy at the inter-grain and interlayer boundaries [15].…”

Section: Introductionmentioning

confidence: 99%

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Filtered cathodic vacuum Arc deposition of nano-layered composite coatings for machining hard-to-cut materials

Volkhonskii

Vereshchaka

Блинков

et al. 2015

Int J Adv Manuf Technol

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In coated tools, the grain boundaries and coating layers are areas of intense energy dissipation, which hardens the coating material by increasing its toughness and its resistance to the formation and development of cracks. An increase in the efficiency of the coatings was achieved by applying nano-dispersed multilayer composite structure. This paper proposes using nano-scale multilayer composite coating based on TiN-CrN compound to improve thermal stability, where, barrier layers based on ZrNbN have been introduced. The ZrNbN barrier does not interact with TiN and CrN at temperatures around 1000°C. The influence of process parameters of the filtered cathodic vacuum arc deposition on the composition, structure and properties of the coatings based on variation of TiAlN-ZrNbN-CrN was analyzed. The results presented here show that the hardness of the developed coatings was as high as 38 GPa. Subsequently, the carbide tools used in this study with the new coatings had an increased lifetime of 1.5-2.0 times compared to tools with commercial coatings. The coated tools were tested in turning and milling of steels, nickel and titanium alloys.

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Section: Coating Depositionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Filtered cathodic vacuum Arc deposition of nano-layered composite coatings for machining hard-to-cut materials

Volkhonskii

Vereshchaka

Блинков

et al. 2015

Int J Adv Manuf Technol

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“…This preferred orientation leads to the absence of some peaks even in thin film mode of XRD measurement compared to the standard peak positions. 19,20) Accordingly, TEM observations have been performed to examine the multiple phase formation in the B-2 film. Figure 2(a) shows the cross sectional bright field TEM image of B-2 film corresponding to the columnar structure.…”

Section: Resultsmentioning

confidence: 99%

Oxidation Resistance of CrAlN Films with Different Microstructures Prepared by Pulsed DC Balanced Magnetron Sputtering System

et al. 2010

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CrAlN films were prepared using a pulsed DC balanced reactive sputtering system under different N 2 /Ar ratios and pulse widths. We investigated the oxidation resistance of two CrAlN films with different microstructures; i) with a fcc-CrN structure, lower internal stress and moderate hardness, and ii) with a mixed structure of hcp-AlN and hcp-Cr 2 N phases, higher internal stress and super high hardness of 41 GPa. The CrAlN film (i) having the single fcc-CrN structure showed good oxidation resistance up to 900 C. The plastic hardness of this film increased to a maximum of 38.5 GPa at 900 C. In contrast, the CrAlN film (ii) with the mixed structure of hcp-AlN and hcp-Cr 2 N phases was stable up to 800 C. The plastic hardness of this film decreased gradually with annealing.

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“…A variety of polycrystalline and single crystalline nitride multilayers, such as TiN/NbN [6], TiN/ZrN [7], TiN/CrN [8], TiN/VN [9], etc. have been developed, mainly by sputtering process.…”

Section: Introductionmentioning

confidence: 99%

Effect of substrate temperature on the properties of reactively sputtered TiN/NbN multilayers

Subramanian

Jayachandran

2011

Cryst. Res. Technol.

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TiN/NbN multilayer coatings were deposited with various substrate temperatures by DC reactive magnetron sputtering method onto Si (111) and glass substrates. The effect of substrate temperature on the structural and optical properties of TiN/NbN multilayers was investigated by X-ray diffraction, X-ray photoelectron spectroscopy, Field emission scanning electron microscopy and Photoluminescence measurements. The composition was analyzed by X-ray photoelectron spectroscopy. X-ray diffraction results showed that the layers crystallized in cubic structure for TiN and hexagonal structure for NbN. It was found that grain size increased with increase in substrate temperature. The surface morphology of the TiN/NbN thin films showed a dense and smooth surface with substrate temperature upto 200 °C but after 300 °C, the grains became larger and coarse surface was observed. The TiN/NbN multilayer coatings exhibited the characteristic peaks centered at 180, 210 and 560 cm -1. Red band emission peaks were observed in the wavelength range of 700-710 nm.

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Investigation of the microstructure and characterizations of TiN/CrN nanomultilayer deposited by unbalanced magnetron sputter process

Cited by 26 publications

References 0 publications

Filtered cathodic vacuum Arc deposition of nano-layered composite coatings for machining hard-to-cut materials

Filtered cathodic vacuum Arc deposition of nano-layered composite coatings for machining hard-to-cut materials

Oxidation Resistance of CrAlN Films with Different Microstructures Prepared by Pulsed DC Balanced Magnetron Sputtering System

Effect of substrate temperature on the properties of reactively sputtered TiN/NbN multilayers

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