Investigation of Ti 0.54 Al 0.46 /Ti 0.54 Al 0.46 N multilayer films deposited by reactive gas pulsing process by nano-indentation and electron energy-loss spectroscopy

Pac, M.-J.; Pinot, Y.; Giljean, Sylvain; Rousselot, C.; Delobelle, P.; Ulhaq‐Bouillet, C.; Tuilier, M.-H.

doi:10.1016/j.tsf.2017.05.015

Cited by 12 publications

(8 citation statements)

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“…TiAl and TiAlN monolayer thin films were deposited onto Si (100) wafer by RF magnetron sputtering using one sintered titanium/aluminium 66/33 at.% alloy target as described elsewhere [4]. Same experimental conditions were used to deposit (TiAl/TiAlN)n multilayer films with different periods using Reactive Gas Pulsing Process (RGPP) [5] with a controlled pulsing flow rate of the nitrogen reactive gas as described elsewhere [1]. Finally, the samples considered in this paper are summarised in Table 1 Nano-indentation tests were performed using an Ultra Nano-indentation Hardness Tester provided by Anton Paar.…”

Section: Methodsmentioning

confidence: 99%

“…Finally, the samples considered in this paper are summarised in Table 1 Nano-indentation tests were performed using an Ultra Nano-indentation Hardness Tester provided by Anton Paar. Experiments were conducted using a Berkovich tip and the multicycle procedure in load control up to 8 mN [1,4].…”

Section: Methodsmentioning

confidence: 99%

“…All the experimental data of the indentation tests performed on the TiAl and TiAlN monolayer films have already been published elsewhere [1,4]. Hardness and indentation modulus values of the metal TiAl are significantly lower than the ones of nitride TiAlN.…”

Section: Mechanical Properties Of Tial and Tialn Monolayersmentioning

confidence: 99%

“…Titanium and aluminium nitrides (TiAl)N coatings are extensively used in the industry since many years for their hardness, toughness and wear and oxidation resistances [2,3]. It has been shown that the indentation modulus and the hardness of Ti 1-x Al x N coatings depend on the aluminium content and that the optimal properties are obtained when the maximum Al content is substituted for Ti in face centred cubic structure close to x = 0.46 [1,4]. One way to improve the hardness of that kind of coatings consists in depositing multilayer films.…”

Section: Introductionmentioning

confidence: 99%

“…In order to facilitate the reading of the paper, Ti 0.54 Al 0.46 and Ti 0.54 Al 0.46 N are respectively written as TiAl and TiAlN. The main objective of the paper is to study the relationship between hardness of as-design multilayer films and periods of their stacking to understand the elastoplastic phenomena that are involved in the hardness increase experimentally observed at the lowest periods [1]. A 2D axisymmetric model of the Berkovich nanoindentation is developed.…”

Section: Introductionmentioning

confidence: 99%

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RELATION BETWEEN HARDNESS OF (Ti, Al)N BASED MULTILAYERED COATINGS AND PERIODS OF THEIR STACKING

Zaoui¹,

Bourceret²,

Gaillard³

et al. 2020

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This study aims to model, by using a finite element method, the relationship between the hardness and the period Λ of metal/nitride multilayer coatings (Ti0.54Al0.46/Ti0.54Al0.46N)n in order to understand the increase of the hardness at the low periods [1] and then optimise the multilayer coating architecture to obtain the best mechanical properties. A 2D axisymmetric finite element model of the Berkovich nanoindentation test was developed. The coating was designed as a stacking of Ti0.54Al0.46 and Ti0.54Al0.46N nanolayers with, in the first hypothesis, equal thickness and perfect interface. The elastoplastic behaviours of the metal and nitride layers were identified by Berkovich nanoindentation experiments and inverse analysis on thick monolayer samples. The indentation curves (P-h) obtained by this model depend on the period Λ of the stacking. Simulated (P-h) curves were compared with experimental data on 2 μm thick films with different periods Λ ranging from 10 to 50 nm deposited by RF magnetron sputtering using reactive gas pulsing process (RGPP). The model forecasts are very consistent with the experience for the largest period but the model does not reproduce the hardness increase at the lowest periods. The Λ = 10 nm coating was analysed by electron energy loss spectroscopy (EELS) on a transmission electron microscope. Results show intermixing of the layers with the presence of nitrogen atoms in the metal layer over a few nanometers [1]. It was concluded that the metal/ceramic interface plays an important role at low periods. The addition in the model of a transition layer in the metal/nitride stacking, with an elastoplastic metal/ceramic medium behaviour, allows to reproduce the nanoindentation experimental curves. The thickness of this transition layer deduced from model updating method is in very good agreement with EELS observations.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Mechanical Properties Of Tial and Tialn Monolayersmentioning

confidence: 99%