Investigation of Unique Carbon Nanotube Cell Restraint Compliant Mechanisms

Toone, Nathan C.; Fazio, Walter C.; Lund, Jason M.; Teichert, Gregory H.; Jensen, Brian D.; Burnett, Sandra H.; Howell, Larry L.

doi:10.1080/15397734.2014.908298

Cited by 10 publications

(2 citation statements)

References 18 publications

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“…It is quite impressive that many of the fabricated cantilevers experienced deflections greater than 10% of their length during testing [33]. This process has been utilized in the fabrication of micrograspers, compliant rotational hinges, lamina emergent mechanisms (LEMs), and constant force micromechanisms (Figure 10) [2,33,93,94,100,101]. All of the aforementioned CMMs benefit from the low Young's modulus and large flexibility.…”

Section: Cnt Frameworkingmentioning

confidence: 99%

“…Despite their enormous success, an increasing number of MEMS devices are under development and are expected to significantly impact disparate fields, such as nano-and bio-manipulation, microsurgery, microrobotics, micro fluidics, microenergy, precision mechanisms, etc. [2][3][4][5][6][7]. With respect to the mechanical domain, micromechanics can be realized by assembling different types of rigid-body joints or using compliant designs.…”

Section: Introductionmentioning

confidence: 99%

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Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Wang

Zhang

et al. 2021

Chin. J. Mech. Eng.

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Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic members and have been proven to be robust by millions of silicon MEMS devices. However, the limited deflection of silicon impedes the realization of more sophisticated CMMs, which often require larger deflections. Recently, some novel manufacturing processes have emerged but are not well known by the community. In this paper, the realization of CMMs is reviewed, aiming to provide help to mechanical designers to quickly find the proper realization method for their CMM designs. To this end, the literature surveyed was classified and statistically analyzed, and representative processes were summarized individually to reflect the state of the art of CMM manufacturing. Furthermore, the features of each process were collected into tables to facilitate the reference of readers, and the guidelines for process selection were discussed. The review results indicate that, even though the silicon process remains dominant, great progress has been made in the development of polymer-related and composite-related processes, such as micromolding, SU-8 process, laser ablation, 3D printing, and the CNT frameworking. These processes result in constituent materials with a lower Young’s modulus and larger maximum allowable strain than silicon, and therefore allow larger deflection. The geometrical capabilities (e.g., aspect ratio) of the realization methods should also be considered, because different types of CMMs have different requirements. We conclude that the SU-8 process, 3D printing, and carbon nanotube frameworking will play more important roles in the future owing to their excellent comprehensive capabilities.

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