Investigation on better Sensitive Silicon based MEMS Pressure Sensor for High Pressure Measurement

Abstract

The paper focuses on the modeling and analysis of MEMS piezoresistive pressure sensors based on shape and performance parameters. The Different shapes of diaphragms namely square, rectangular and circular diaphragms made of silicon were modeled and their performance parameters namely deflection and stress were analyzed. The simulations performed using the FEM software Intellisuite® proved that the better shape for the design of a piezoresistive pressure sensor is one with the square shaped diaphragm. The square shaped diaphragm with varying thickness is simulated and tested till their burst pressures. The work is then high lightened on the modeling of MEMS piezoresistive pressure sensors with two different square shaped diaphragms, one with silicon and the second with silicon and silicon dioxide stack using the FEM software Intellisuite®, and comparing the performance parameters of the two sensors. The diaphragm deflection in silicon pressure sensor was found to be less when compared to SOI pressure sensors, and the SOI pressure sensor is capable of giving more output voltage and exhibits more voltage sensitivity. The thickness of SOI layer plays an integral part of sensor design. Unlike the silicon pressure sensor, the SOI pressure sensor is able to operate at large pressures by changing the dimension of the diaphragm while maintaining appreciable voltage sensitivity.

Pressure sensor diaphragm modelling and deformation analysis

“…Learn more about the granular level of control you have over the appearance of your materials by exploring the Contents tab of the Material settings window. If there is a green checkmark next to a property, this indicates that the simulation's physics will be making use of the feature [10].…”

“…As the capacitance is inversely proportional to the separation between the two plates, we may control the capacitance by changing the distance between the plates by changing the amount of pressure applied to the plate that is moving. We are working on a capacitive pressure sensor in which the diaphragm may take on a variety of forms while retaining the same footprint [2]. The pressure sensor's readings will improve as a result of this.…”