2008
DOI: 10.1002/cvde.200706646
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Investigation on Nanodiamond and Carbon Nanotube‐Diamond Nanocomposite Synthesized using RF‐PECVD

Abstract: Nanodiamond (ND) and carbon nanotube-diamond (CNTD) nanocomposite films are synthesized on silicon(100) substrates, discharging hydrogen-based gas mixture (methane and hydrogen), using radio frequency plasma-enhanced (RF-PE)CVD. Substrate pretreatment conditions are examined for enhancing microdiamond (MD), ND, CNTD nanocomposite, or carbon nanotube (CNT) nucleation. Well-faceted MD with a low nucleation density, on a silicon substrate, is achieved using a solution of NaOH in water to roughen the silicon subst… Show more

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Cited by 7 publications
(4 citation statements)
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“…This suggests that this growing pattern is attributed to the carbon radical concentration in the plasma and the appropriate nucleation sites such as the CNT tips or the surface defects. [23] In general, a hydrogen-rich gas mixture (H 2 /CH 4 ) can be used to grow micro-and nanodiamond films, [24] where atomic hydrogen is needed to selectively etch the graphitic bonding during the growth. The formation of carbon nanocones is also correlated to this etching effect during the deposition.…”
Section: Resultsmentioning
confidence: 99%
“…This suggests that this growing pattern is attributed to the carbon radical concentration in the plasma and the appropriate nucleation sites such as the CNT tips or the surface defects. [23] In general, a hydrogen-rich gas mixture (H 2 /CH 4 ) can be used to grow micro-and nanodiamond films, [24] where atomic hydrogen is needed to selectively etch the graphitic bonding during the growth. The formation of carbon nanocones is also correlated to this etching effect during the deposition.…”
Section: Resultsmentioning
confidence: 99%
“…Table 2 summarizes the tribological performance for NCD lubricating films. At present, there are three kinds of CVD equipment for preparing NCD films, namely hot filament CVD (HFCVD) [ 84 , 85 , 86 , 87 , 88 , 89 , 90 ], microwave plasma CVD (MPCVD) [ 91 , 92 , 93 , 94 , 95 , 96 ] and plasma enhanced CVD (PECVD) [ 97 , 98 , 99 , 100 , 101 ]. The schematic diagram of diamond film preparation is shown in Figure 4 .…”
Section: Ncd For Tribological Applicationsmentioning
confidence: 99%
“…forming composites . Several reports deal with a preparation of pure carbon‐carbon composites, especially CNTs and nanodiamond powders (ND) and in rare cases CNTs and nanocrystalline diamond (NCD) . In some cases a transformation of multi‐wall carbon nanotubes (MWNTs) to diamond/amorphous carbon was observed.…”
Section: Introductionmentioning
confidence: 99%