Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

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This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement.

Section: Phononic Crystals Structure and Band Gapsmentioning

confidence: 99%

“…Several researchers [8,9,10,11,12,13,14,15,16] have demonstrated the ring resonators or (disc resonator with hole is developed in center). It is noted that operating frequency, and design of resonator play an important role in the performance and improving the quality factor of resonators.…”

Section: Introductionmentioning

confidence: 99%

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Khan

Bao

et al. 2019

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“…In CVGs, the resonating mass acts as the main sensing element and the geometry of it can be of different shapes. Based on the resonating mass, these types of gyroscopes can be in the form of a string [ 4 ], a single beam [ 5 , 6 ], U-shaped tuning forks (two parallel beams) [ 7 , 8 , 9 ], rocking-mass gyroscope systems (two perpendicular in-plane beams) [ 10 , 11 ], a butterfly [ 12 , 13 ], disks [ 14 , 15 , 16 , 17 , 18 , 19 ], cloverleaf-type disks [ 20 ], rings [ 21 , 22 , 23 ], rings with compliant spokes [ 24 ], non-continuous double rings (called folded-beam disks) [ 25 ], disks with special forms of supporting beams (called honeycomb disks) [ 26 ], cylinders [ 27 , 28 , 29 , 30 , 31 ], cupped cylinders [ 32 ], bell-shapes [ 33 , 34 , 35 ], 3D rectangular parallelepiped gyroscopes based on special vibratory modes of solid material (e.g., thickness-shear vibrating mode) [ 36 , 37 ], pierced shallow shells [ 38 ], shallow shells [ 39 ], microbubbles (spherical caps with a radius-over-height ratio larger than one) [ 40 ], cennospheres (hollow spheres) [ 41 ], quasi-spherical forms [ 42 ], spherical shell resonator gyroscopes [ 43 , 44 ,…”

Section: Introductionmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

“…There are various factors that lead to the energy dissipation in MEMS gyroscopes, such as the air damping, the surface loss, the thermoelastic damping, and so on [ 2 , 3 , 4 ]. These damping terms determine the limitation of the gyro’s intrinsic Q and have already been fixed during the processing.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes

et al. 2021

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For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (Q) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric excitation is applied in a push-pull driven disk resonator gyroscope (DRG) to improve its sensitivity by an electrical pump, causing an arbitrary increase of the “effective Q”. However, due to the differential characteristics of the push-pull driving method, the traditional parametric excitation method is not applicable. As a result, two novel methods are proposed and experimentally carried out to achieve parametric excitation in the push-pull driven DRGs, resulting in a maximum “effective Q” of 2.24 × 106 in the experiment, about a 7.6 times improvement over the intrinsic Q. Besides, subharmonic excitation is also theoretically analyzed and experimentally characterized. The stability boundary of parametric excitation, defined by a threshold voltage, is theoretically predicted and verified by related experiments. It is demonstrated that, when keeping the gyroscope’s vibration at a constant amplitude, the fundamental frequency driving voltage will decrease with the increasing of the parametric voltage and will drop to zero at its threshold value. In this case, the gyroscope operates in a generalized parametric resonance condition, which is called subharmonic excitation. The novel parametric and subharmonic excitation theories displayed in this paper are proven to be efficient and tunable dynamical methods with great potential for adjusting the quality factor flexibly, which can be used to further enhance the resonator’s performance.