2019 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP) 2019
DOI: 10.1109/dtip.2019.8752638
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Investigations of Aluminum Nitride based piezoelectric MEMS

M. Stiebing
1
,
Majid Tavakolibasti
2
,
Chris Stoeckel
3
et al.
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