In the present work, we report on the microfabrication of metal hydride thin-film electrodes which can be utilized for rechargeable microbatteries or sensor applications. A multi-layer deposition technique is developed based on physical vapor deposition to fabricate the thin-film electrodes on a glass substrate. The morphology and the structure of the thin-film electrodes are studied by using Field Emission Scanning Electron Microscopy coupled with an Energy Dispersive Spectroscopy module. The surface composition of the thin-film electrodes are determined using X-ray Photoelectron Spectroscopy. Cyclic Voltammetry and galvanostatic charge-discharge measurements are performed to obtain insights into the electrochemical performance of the electrodes. Finally, a semi-empirical model is derived which allows for the determination of the equilibrium potential of the electrode as a function of its hydrogen content.