[Invite Paper] High Accuracy High Spatial Resolution and Real-Time CMOS Proximity Capacitance Image Sensor Technology and its Applications

Kuroda, Rihito; Yamamoto, Masahiro; Sugama, Yuki; Watanabe, Yoshiaki; Suzuki, Masato; Goto, Tetsuya; Yasuda, Toshiro; Murakami, Shinichi; Yokomichi, Yayoi; Hamori, Hiroshi; Sugawa, Shigetoshi

doi:10.3169/mta.9.122

Cited by 5 publications

(6 citation statements)

References 15 publications

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“…ere are 16 chips manufactured. Due to noise reduction technology, the m-pitch pixel achieves a detection accuracy of 0.1aF at an input voltage of 20 V. He also gave an example of capacitive imaging using the prepared CMOS proximity capacitive image sensor [7].…”

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confidence: 99%

Design of Remote Monitoring Iot System Based on 5G and New Optical Fiber Intelligent Structure

2022

Advances in Materials Science and Engineering

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In recent years, with the progress and development of social science and technology, remote monitoring of Internet of Things systems has attracted more and more attention. The remote monitoring system is mainly a network system with convenient layout, simple maintenance, and high security performance built on the basis of the wireless network, which can realize real-time monitoring, and collects transmit information. It is mostly used in remote monitoring of room temperature, remote monitoring of intelligent furniture, engineering construction, and teaching. Communication technology dominates the operation of remote monitoring systems. With the introduction of 5G technology, mobile Internet technology has been pushed to the top of technology again. Using 5G mobile communication technology in the monitoring system, people can observe or operate the monitored things at any time. The sensor is an indispensable component of the remote monitoring system, and a new type of optical fiber is added to the sensor to make the system function more complete. However, the related technology is not very mature, and the research on remote monitoring system is relatively backward in China. Relevant studies have found that when the remaining energy of the information node in the remote monitoring system reaches 10%, the information node will die and the speed of information transmission will decrease. Therefore, adding new technologies is conducive to improving the performance of remote monitoring systems.

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confidence: 99%

Design of Remote Monitoring Iot System Based on 5G and New Optical Fiber Intelligent Structure

2022

Advances in Materials Science and Engineering

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“…Figure 20 shows the benchmarking of the developed proximity capacitance CMOS image sensors with other array and discrete capacitance sensors [ 6 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 26 ]. The developed sensors had a large pixel area and a higher resolution while achieving higher detection accuracy than those of other sensors.…”

Section: Chip Fabrication and Measurement Resultsmentioning

confidence: 99%

“… Benchmark comparison with other sensors [ 6 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 26 ]: ( a ) comparison of detection precision and pixel area; ( b ) comparison of detection precision and pixel pitch and examples of target. …”

Section: Figurementioning

confidence: 99%

“…Previous works have reported discrete sensors with aF-order detection precision [ 13 , 15 , 16 ] and an array sensor with a detection area of 8.73 cm 2 with 11.4 µm pitch pixels [ 6 ]. Previously, we have presented a prototype CMOS proximity capacitance image sensor with 256 H × 256 V 16 µm pitch pixels achieving 100 zF detection precision due to an advanced noise cancelling technique [ 17 , 18 , 19 , 20 , 21 , 22 ]. However, the simultaneous achievement of a detection precision of less than aF and a detection area of more than 1 cm 2 , or a pixel pitch of less than 10 μm toward a higher resolution, has not been reported yet.…”

Section: Introductionmentioning

confidence: 99%

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Two High-Precision Proximity Capacitance CMOS Image Sensors with Large Format and High Resolution

Sugama

Watanabe

Kuroda

et al. 2022

Sensors

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This paper presents newly developed two high-precision CMOS proximity capacitance image sensors: Chip A with 12 μm pitch pixels with a large detection area of 1.68 cm2; Chip B with 2.8 μm pitch 1.8 M pixels for a higher resolution. Both fabricated chips achieved a capacitance detection precision of less than 100 zF (10−19 F) at an input voltage of 20 V and less than 10 zF (10−20 F) at 300 V due to the noise cancelling technique. Furthermore, by using multiple input pulse amplitudes, a capacitance detection dynamic range of up to 123 dB was achieved. The spatial resolution improvement was confirmed by the experimentally obtained modulation transfer function for Chip B with various line and space pattens. The examples of capacitance imaging using the fabricated chips were also demonstrated.

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“…OHT Inc. and Shenzhen Nanovision Corporation have jointly developed a new mini-LED substrate inspection equipment using "EPIS" with a high-precision proximity capacitance image sensor [4,5] that consists of numerous arrayed electrodes, performing high-speed electrical defect inspection without probing on LED pads.…”

Section: Introductionmentioning

confidence: 99%

34.3: High Resolution and High Speed Inspection Equipment for Mini‐LED Substrates

Yasuda¹,

Kobayashi²,

Yamamoto³

et al. 2022

Symp Digest of Tech Papers

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A new mini LED substrate inspection equipment using a non‐connected high‐precision proximity capacitance image sensor system named as “EPIS” (Electrical Picture Inspection System) with one‐unit pixel size of 12μm, the number of pixels of 1080 x 1080 and capacitance detection accuracy of 0.1aF has been developed. In this paper, detection results of a mini LED substrate using EPIS and the equipment are discussed.

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[Invite Paper] High Accuracy High Spatial Resolution and Real-Time CMOS Proximity Capacitance Image Sensor Technology and its Applications

Cited by 5 publications

References 15 publications

Design of Remote Monitoring Iot System Based on 5G and New Optical Fiber Intelligent Structure

Design of Remote Monitoring Iot System Based on 5G and New Optical Fiber Intelligent Structure

Two High-Precision Proximity Capacitance CMOS Image Sensors with Large Format and High Resolution

34.3: High Resolution and High Speed Inspection Equipment for Mini‐LED Substrates

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