Invited Article: Tuning and stabilization of optomechanical crystal cavities through NEMS integration

Abstract

Nanobeam optomechanical crystals, in which localized GHz frequency mechanical modes are coupled to wavelength-scale optical modes, are being employed in a variety of experiments across different material platforms. Here, we demonstrate the electrostatic tuning and stabilization of such devices, by integrating a Si 3 N 4 slot-mode optomechanical crystal cavity with a nanoelectromechanical systems (NEMS) element, which controls the displacement of an additional "tuning" beam within the optical near-field of the optomechanical cavity. Under DC operation, tuning of the optical cavity wavelength across several optical linewidths with little degradation of the optical quality factor (Q ≈ 10 5 ) is observed. The AC response of the tuning mechanism is measured, revealing actuator resonance frequencies in the 10 MHz to 20 MHz range, consistent with the predictions from simulations. Feedback control of the optical mode resonance frequency is demonstrated, and alternative actuator geometries are presented.

Opto-Mechanical Photonic Crystal Cavities for Sensing Application

“…With two PCNs etched on two vertically coupled GaAs flexible nanobeams, a large wavelength tuning range over 12 nm was achieved through a bias voltage 15V. Moreover, triple-coupled PCN cavities [58,59] with a Q-factor reaching up to 8 × 10 4 have been reported. By precisely controlling the position of cavity vertically and horizontally, a 41.69-pm wavelength tuning of resonance and small degradation of Q-factor were obtained [59].…”

“…Moreover, triple-coupled PCN cavities [58,59] with a Q-factor reaching up to 8 × 10 4 have been reported. By precisely controlling the position of cavity vertically and horizontally, a 41.69-pm wavelength tuning of resonance and small degradation of Q-factor were obtained [59]. Coupled resonant system with high Q-factor and high transmission opened interesting perspectives in nonlinear optics and signal processing.…”

Applications of Photonic Crystal Nanobeam Cavities for Sensing

“…In this way, the resonance and Q factor of the cavity could be stabilized. In [ 114 ], an on-chip NEMS actuator was used to stabilize the optical mode wavelength.…”

Impact of Transduction Scaling Laws on Nanoelectromechanical Systems

“…where ϵ 0 is the vacuum permittivity, g is the cross-sectional distance, a ¼ b ¼ [30,35,42]. We calculate D c for different initial gaps, g 0 , with and without the fringing fields [ Fig.…”