Ion beam figuring approach for thermally sensitive space optics

Yin, Xiaolin; Deng, Wei; Tang, Wa; Zhang, Binzhi; Xue, Desheng; Zhang, Feng; Zhang, Xuejun

doi:10.1364/ao.55.008049

Cited by 10 publications

(3 citation statements)

References 13 publications

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“…The removal function in IBF is “sub-aperture”, i.e., significantly smaller than the size of the optics. This facilitates IBF in polishing non-planar workpieces (aspheric [ 190 , 193 ], shallow spherical, parabolic [ 36 ], and non-axially symmetric [ 194 ]) of different materials (ceramics, stainless steel, magnesium alloy, high-speed steels, BK7 [ 195 ], and SiC [ 196 ]). In addition to surface shape adaptability, the IBP process has high stability, repeatability, and accuracy, as shown in Table 8 .…”

Section: Non-modification Polishing Approachesmentioning

confidence: 99%

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Polishing Approaches at Atomic and Close-to-Atomic Scale

2023

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Roughness down to atomic and close-to-atomic scale is receiving an increasing attention in recent studies of manufacturing development, which can be realized by high-precision polishing processes. This review presents polishing approaches at atomic and close-to-atomic scale on planar and curved surfaces, including chemical mechanical polishing, plasma-assisted polishing, catalyst-referred etching, bonnet polishing, elastic emission machining, ion beam figuring, magnetorheological finishing, and fluid jet polishing. These polishing approaches are discussed in detail in terms of removal mechanisms, polishing systems, and industrial applications. The authors also offer perspectives for future studies to address existing and potential challenges and promote technological progress.

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Section: Non-modification Polishing Approachesmentioning

confidence: 99%

“…In addition to surface shape adaptability, the IBP process has high stability, repeatability, and accuracy, as shown in Table 8 . This is because IBF can remove material from the workpiece surface at the atomic level, is not affected by wear, and there is no edge roll-down effect [ 196 ].…”

Section: Non-modification Polishing Approachesmentioning

confidence: 99%

Polishing Approaches at Atomic and Close-to-Atomic Scale

2023

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“…One of the main advantages of IBF is the contactless nature of an ion beam as a polishing tool, which eliminates the edge roll-off effects of mechanical tools. Because the energy distribution of an ion beam can be accurately controlled, excellent stability of atomic-level removal can be achieved [185][186][187].…”

Section: Stressed-lap Polishingmentioning

confidence: 99%

Manufacturing technologies toward extreme precision

Zhang

Yan

Kuriyagawa

2019

Int. J. Extrem. Manuf.

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Precision is one of the most important aspects of manufacturing. High precision creates high quality, high performance, exchangeability, reliability, and added value for industrial products. Over the past decades, remarkable advances have been achieved in the area of high-precision manufacturing technologies, where the form accuracy approaches the nanometer level and surface roughness the atomic level. These extremely high precision manufacturing technologies enable the development of high-performance optical elements, semiconductor substrates, biomedical parts, and so on, thereby enhancing the ability of human beings to explore the macro- and microscopic mysteries and potentialities of the natural world. In this paper, state-of-the-art high-precision material removal manufacturing technologies, especially ultraprecision cutting, grinding, deterministic form correction polishing, and supersmooth polishing, are reviewed and compared with insights into their principles, methodologies, and applications. The key issues in extreme precision manufacturing that should be considered for future R&D are discussed.

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Dwell Time Algorithm Based on Bounded Constrained Least Squares Under Dynamic Performance Constraints of Machine Tool in Deterministic Optical Finishing

Zhang

Huang

Fan

2021

Int. J. of Precis. Eng. and Manuf.-Green Tech.

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The dwell time algorithm is one of the most important techniques within the deterministic optical surfacing technologies. The existing dwell time algorithms are generally based on non-negative least squares (NNLS) without considering the dynamic performance constraints of machine tools. This is a circumstance that leads to poor convergence accuracy. In this paper, a dwell time algorithm, based on bounded constrained least-squares (BCLS) under dynamic performance constraints of the machine tool, has been developed. The upper and lower constraints of the dwell time model could be derived through the acceleration and deceleration mechanism of the CNC (Computer Numerical Control) machine tools. A two-metric projection Newton iteration algorithm was used to solve the large-scale dwell time model, which greatly improved the computation efficiency. The results of the experiments and simulations showed that the proposed algorithm will give a very high convergence accuracy for optical finishing with machine tools with different dynamic performances. When the machine acceleration was set to a value as low as 0.1 g, the accuracies of the surface figures PV (Peak-to-Valley) and RMS (Root Mean Square) till improved by 40.8% and 55.2%, respectively, when using the BCLS algorithm. The influences of different dynamic performances of the machine tools on the dwell time solutions have also been investigated, which will provide a good guidance in the design of deterministic polishing machine tools.

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Ion beam figuring approach for thermally sensitive space optics

Cited by 10 publications

References 13 publications

Polishing Approaches at Atomic and Close-to-Atomic Scale

Polishing Approaches at Atomic and Close-to-Atomic Scale

Manufacturing technologies toward extreme precision

Dwell Time Algorithm Based on Bounded Constrained Least Squares Under Dynamic Performance Constraints of Machine Tool in Deterministic Optical Finishing

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