During the ion beam figuring (IBF) of a space mirror, thermal radiation of the neutral filament and particle collisions will heat the mirror. The adhesive layer used to bond the metal parts and the mirror is very sensitive to temperature rise. When the temperature exceeds the designed value, the mirror surface shape will change markedly because of the thermal deformation and stress release of the adhesive layer, thereby reducing the IBF accuracy. To suppress the thermal effect, we analyzed the heat generation mechanism. By using thermal radiation theory, we established a thermal radiation model of the neutral filament. Additionally, we acquired a surface-type Gaussian heat source model of the ion beam sputtering based on the removal function and Faraday scan result. Using the finite-element-method software ABAQUS, we developed a method that can simulate the thermal effect of the IBF for the full path and all dwell times. Based on the thermal model, which was experimentally confirmed, we simulated the thermal effects for a 675 mm×374 mm rectangular SiC space mirror. By optimizing the dwell time distribution, the peak temperature value of the adhesive layer during the figuring process was reduced under the designed value. After one round of figuring, the RMS value of the surface error changed from 0.094 to 0.015λ (λ=632.8 nm), which proved the effectiveness of the thermal analysis and suppression method.
A high vacuum environment safeguards the performance of special processing technologies and high-precision parts such as nanosecond laser processing, chip packaging, and optical components. However, it poses higher requirements for the machine tool, which makes the temperature control of machine tools an important goal in design and development. In this paper, the thermal properties of a large-scale 5-axis laser processing machine tool in a vacuum environment were investigated. The thermal contact resistance between parts is identified by the parametric simulation and experiment. The whole machine temperature field was then obtained based on the fluid–thermal coupling model and verified by experiment. The results showed that the thermal contact resistance of the motor and reducer with the water cold plate was 560 W/(m2∙°C) and 510 W/(m2∙°C), respectively, and the maximum temperature increase of the machine was 3 °C. Based on the results, the machine tool’s temperature increase prediction chart was obtained by simulation under different processing conditions such as cooling water flow rate, cooling water temperature, motor speed, and ambient temperature. It provides technical and data references for the research on the thermal stability of the machine tool in processing.
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