Ion beam figuring of highly steep mirrors with a 5-axis hybrid machine tool

Yin, Xiaolin; Tang, Wa; Hu, Haixiang; Zeng, Xuefeng; Wang, Dekang; Xue, Desheng; Zhang, Feng; Deng, Wei; Zhang, Xuejun

doi:10.1117/12.2312333

Fourth Seminar on Novel Optoelectronic Detection Technology and Application 2018

DOI: 10.1117/12.2312333

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Ion beam figuring of highly steep mirrors with a 5-axis hybrid machine tool

Xiaolin Yin¹,

Wa Tang

Haixiang Hu

et al.

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Ion beam figuring of highly steep mirrors with a 5-axis hybrid machine tool

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