Ion Beam Figuring of Strongly Curved Surfaces with a (X, Y, Z) Linear Three-Axes System

Haensel, Thomas; Nickel, Andreas; Schindler, Axel

doi:10.1364/oft.2008.jwd6

Cited by 20 publications

(9 citation statements)

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“…The thermal source power distribution obtained by simulation is shown in Fig. 4, which is close to the shape of material removal spot obtained by experiment in reference [8]. It can be seen that when the incidence angle θ is 0 °, the distribution is circular, and the x and y directions are symmetrical.…”

Section: Thermal Effect Simulation By Cae Methodssupporting

confidence: 79%

“…According to the equations ( 8) and (10), the total power of the heat source and thermal power density distribution could be calculated. Taking the heat source power into equation (8) and equation (10) obtained thermal power density distribution. Then used CAE method to simulate the thermal power density distribution and thermal effect of BK7 glass plane optical component with a diameter of 50mm and a thickness of 5mm during ion beam figuring.…”

Section: Thermal Effect Simulation By Cae Methodsmentioning

confidence: 99%

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Influence of ion beam incidence angle on thermal effect

Xia¹,

Feng

Zhang³

et al. 2023

International Conference on Optical and Photonic Engineering (icOPEN 2022)

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During the optical components figuring by ion beam, the temperature of the optical component will rise quickly because of the collision between the ions and the atoms of the optical component. In order to investigate the thermal effect of the ion beam figuring, the thermal deposition model is established based on the Sigmund theory of sputtering, and the thermal power density function of the surface heat source is obtained. Moreover, the thermal power density function is also modified based on the geometric relationship between surface of optical component and ion beam for establishing the incidence of the angle of ion beam to thermal power density. On this basis, the CAE (Computer Aided Engineering method was used to simulate the progress of the BK7 glass figuring by ion beam. And the modified thermal power density function is programed as heat flow load in the CAE model. The total power of thermal deposition under the different incidence angle of ion beam was obtained by Monte Carlo method. The result shows that the modified thermal power density function is close to the experimental result in other literatures. Meanwhile, the result shows the deposition energy and the maximum stress decrease with the increase of incidence angle.

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Section: Thermal Effect Simulation By Cae Methodssupporting

confidence: 79%

Section: Thermal Effect Simulation By Cae Methodsmentioning

confidence: 99%

Influence of ion beam incidence angle on thermal effect

Xia¹,

Feng

Zhang³

et al. 2023

International Conference on Optical and Photonic Engineering (icOPEN 2022)

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“…We proposed a method to revise Eq. (5). Except for the damped factor, the extra removal amount is introduced to expand the freedom of solution.…”

Section: B Revised Matrix Equationmentioning

confidence: 99%

“…Ion beam figuring (IBF) avoids these problems because of noncontact figuring. More attention has been paid to this technology during the past two decades [1][2][3][4][5]. The principle of IBF is that the computer controlled fiveaxis moving system moves an ion beam source according to a predefined scanning path and computed dwell time on the optical surface, and the desired removal amounts can be removed by sputtering between the ion beam and the optical material.…”

Section: Introductionmentioning

confidence: 99%

Dwell time algorithm in ion beam figuring

Zhang

et al. 2009

Appl. Opt.

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To get a high-precision optical surface, the deconvolved process of dwell time was transferred to a matrix equation in which the damped factor and the extra removal amount were introduced to expand the freedom of solution. A path weight factor and a surface error weight factor were used to take the scanning path and the initial surface error into account. Combined with the Gerchberg bandlimited extrapolation algorithm for initial surface error map extension, a high-precision final surface could be obtained within a factual aperture. Two surface error maps were calculated to rms = 0.1 nm from rms = 130.23 nm and to rms = 0.08 nm from rms = 82.74 nm. The simulations show that a perfect dwell time solution could be obtained by the revised matrix equation and initial surface error map extension with the help of the least squares QR (LSQR) algorithm.

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“…Besides these, IOM [8,10] and GFKD [11] have built low-cost three-axis IBF (TIF) systems and obtained successful processing results by using compensation methods. However, to further improve the surface accuracy, especially for the lithography optics, a more accurate algorithm for the IBF process is required, but no clear insight of this research exists so far.…”

Section: Introductionmentioning

confidence: 99%

Mathematical modeling and application of removal functions during deterministic ion beam figuring of optical surfaces Part 1: Mathematical modeling

et al. 2014

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Ion beam figuring (IBF) is established for the final precision figuring of high-performance optical components, where the figuring accuracy is guaranteed by the stability of the removal function and the solution accuracy of the dwell time. In this deterministic method, the figuring process can be represented by a two-dimensional (2D) convolution operation of a constant removal function and the dwell time. However, we have found that the current 2D convolution operation cannot factually describe the IBF process of curved surfaces, which neglects the influences of the projection distortion and the workpiece geometry on the removal function. Consequently, the current 2D convolution algorithm would influence the solution accuracy for the dwell time and reduce the convergence of the figuring process. In this part, based on the material removal characteristics of IBF, a mathematical model of the removal function is developed theoretically and verified experimentally. Research results show that the removal function during IBF of a curved surface is actually a dynamic function in the 2D convolution algorithm. The mathematical modeling of the dynamic removal function provides theoretical foundations for our proposed new algorithm in the next part, and final verification experiments indicate that this algorithm can effectively improve the accuracy of the dwell time solution for the IBF of curved surfaces.

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Ion Beam Figuring of Strongly Curved Surfaces with a (X, Y, Z) Linear Three-Axes System

Cited by 20 publications

References 0 publications

Influence of ion beam incidence angle on thermal effect

Influence of ion beam incidence angle on thermal effect

Dwell time algorithm in ion beam figuring

Mathematical modeling and application of removal functions during deterministic ion beam figuring of optical surfaces Part 1: Mathematical modeling

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