2003
DOI: 10.1063/1.1604933
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Ion beam smoothening of metal surfaces

Abstract: Articles you may be interested inSmoothing metallic glasses without introducing crystallization by gas cluster ion beam Appl. Phys. Lett. 102, 101604 (2013); 10.1063/1.4794540Surface cleaning and modification of Si(100) substrates by ethanol and water cluster ion beams Rev.

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Cited by 14 publications
(6 citation statements)
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“…Recent advances in the use of ion-sputtering has been attracted considerable theoretical and experimental attention [11]. In particular, ion-sputtering has been simulated by molecular dynamics using sequential bombardment of metallic surfaces [12][13][14][15]. In order to get more insight into processes which govern interdiffusion during repeated ion-bombardments Auger electron spectroscopy (AES) depth profiling analysis (see e.g.…”
Section: Introductionmentioning
confidence: 99%
“…Recent advances in the use of ion-sputtering has been attracted considerable theoretical and experimental attention [11]. In particular, ion-sputtering has been simulated by molecular dynamics using sequential bombardment of metallic surfaces [12][13][14][15]. In order to get more insight into processes which govern interdiffusion during repeated ion-bombardments Auger electron spectroscopy (AES) depth profiling analysis (see e.g.…”
Section: Introductionmentioning
confidence: 99%
“…Swift heavy ion elongation [3,4] and ion beam processing of nanocrystalline materials [5,6] have been becoming important methods in endowing materials with new functions and developing new products. Quantum dots have been achieved by focused ion beam-assisted modification of nanocrystalline surface [7,8]. It is found that the ion beams can be used to reorient and align nanowires into specific directions, engineering of solid surface with patterned direction-dependent properties becomes possible [9,10].…”
Section: Introductionmentioning
confidence: 99%
“…The actual monochromator is a modification of a two-bounce classic channel-cut crystal with totally open diffracting surfaces, which makes it easier to polish them. To achieve highly polished [better than 30 nm peak-to-valley (P-V) flatness, and 1-2 A root mean square (rms) roughness] diffracting surfaces with conventional polishing techniques still remains a challenge, but should be explored before applying expansive technologies such as ion-beam figuring (IBF) [2]. In this paper we will present characteristics of polished diffracting surfaces of a Z-monochromator made of silicon single crystal by conventional polishing methods, dependence of background patterns of high-resolution x-ray topography measurements on polishing quality, and will discuss possible ways to enhance the performance of the monochromator.…”
Section: Introductionmentioning
confidence: 99%