Ion beam sputter-deposition of LiCoO2 films

Stockhoff, T.; Gallasch, Tobias; Berkemeier, Frank; Schmitz, Guido

doi:10.1016/j.tsf.2011.12.065

Cited by 14 publications

(15 citation statements)

References 15 publications

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“…LiCoO 2 that has layered rhombohedral structure with a space group

at high temperature ( Figure 19 a‐1 ) and slightly distorted cubic structure with a space group Fd 3 m at lower temperature (Figure 19a‐2 ) is one of the intensively studied thin film electrodes. [ 208 , 209 , 210 , 211 , 212 , 213 , 214 , 215 , 216 , 268 ] The lattice structure of LiCoO 2 consists of CoO 2 and Li layers, which are stacked along its c‐axis giving the lattice parameters a and c to be 2.8138 Å and 14.0516Å, respectively. Due to the stacking along the c‐axis, the Li ions in the layered LiCoO 2 only exhibit 2D migration pathways along a ‐ and b ‐axis.…”

Section: Thin Film Electrodes For Atfbsmentioning

confidence: 99%

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All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

Dai

et al. 2021

Advanced Science

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Continuous advances in microelectronics and micro/nanoelectromechanical systems enable the use of microsized energy storage devices, namely solid-state thin-film -batteries. Different from the current button batteries, the -battery can directly be integrated on microchips forming a very compact "system on chip" since no liquid electrolyte is used in the -battery. The all-solid-state battery (ASSB) that uses solid-state electrolyte has become a research trend because of its high safety and increased capacity. The solid-state thin-film -battery belongs to the family of ASSB but in a small format. However, a lot of scientific and technical issues and challenges are to be resolved before its real application, including the ionic conductivity of the solid-state electrolyte, the electrical conductivity of the electrode, integration technologies, electrochemical-induced strain, etc. To achieve this goal, understanding the processing of thin films and fundamentals of ion transfer in the solid-state electrolytes and hence in the -batteries becomes utmost important. This review therefore focuses on solid-state ionics and provides inside of ion transportation in the solid state and effects of chemistry on electrochemical behaviors and proposes key technology for processing of the -battery.

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“…LiCoO 2 that has layered rhombohedral structure with a space group

Section: Thin Film Electrodes For Atfbsmentioning

confidence: 99%

Section: Thin Film Electrodes For Atfbsmentioning

confidence: 99%

All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

Dai

et al. 2021

Advanced Science

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“…In most cases, the films deposited at T s = 25 °C were found to be amorphous and subsequently developed a (003), (101), (110), or (104) out-of-plane texture upon annealing, depending on thickness [39,49]. Stockhoff et al [14] stated that a lattice structure similar to the LT-LiCoO 2 phase is obtained at T s < 300 °C, while HT-LiCoO 2 is prepared at T s > 300 °C and in the Ar/O 2 (3:2) atmosphere. LCO films were grown on Pt-coated Si wafers heated in the range 25–600 °C in an Ar/O 2 (ratio 3:1) gas flow rate of 12 sccm.…”

Section: Influence Of Preparation Conditionsmentioning

confidence: 99%

Section: Figurementioning

confidence: 99%

Sputtered LiCoO2 Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries

2019

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This review article presents the literature survey on radio frequency (RF)-magnetron sputtered LiCoO2 thin films used as cathode materials in all-solid-state rechargeable lithium microbatteries. As the process parameters lead to a variety of texture and preferential orientation, the influence of the sputtering conditions on the deposition of LiCoO2 thin films are considered. The electrochemical performance is examined as a function of composition of the sputter Ar/O2 gas mixture, gas flow rate, pressure, nature of substrate, substrate temperature, deposition rate, and annealing temperature. The state-of-the-art of lithium microbatteries fabricated by the rf-sputtering method is also reported.

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“…A structural feature of LiCoO 2 is specified as a hexagonal layered crystal structure (space group R-3m), constructed by a cobalt layer and lithium layer alternately occupying octahedral sites between adjacent close-packed planes of oxygen. LiCoO 2 atoms in crystal (R-3m) are in thethe following Wyckoff positions: Co in 3a (0,0,0), Li in 3b (0,0,12), and O in 6c sites (0,0,14) [12]. Two main polymorphic states of the layered oxide compound LiCoO 2 are known: the rhombohedral phase and the metastable cubic phase, as shown in Figure 1.…”

Section: Introductionmentioning

confidence: 99%

Annealing Optimization of Lithium Cobalt Oxide Thin Film for Use as a Cathode in Lithium-Ion Microbatteries

et al. 2022

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The microbatteries field is an important direction of energy storage systems, requiring the careful miniaturization of existing materials while maintaining their properties. Over recent decades, LiCoO2 has attracted considerable attention as cathode materials for lithium-ion batteries due to its promising electrochemical properties for high-performance batteries. In this work, the thin films of LiCoO2 were obtained by radio-frequency magnetron sputtering of the corresponding target. In order to obtain the desired crystal structure, the parameters such as annealing time, temperature, and heating rate were varied and found to influence the rhombohedral phase formation. The electrochemical performances of the prepared thin films were examined as a function of annealing time, temperature, and heating rate. The LiCoO2 thin film cathode annealed at 550 °C for 1 h 20 min demonstrated the best cycling performance with a discharge specific capacity of around 135 mAh g−1 and volumetric capacity of 50 µAh cm−2µm−1 with a 77% retention at 0.5 C rate.

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Ion beam sputter-deposition of LiCoO2 films

Cited by 14 publications

References 15 publications

All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

Sputtered LiCoO2 Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries

Annealing Optimization of Lithium Cobalt Oxide Thin Film for Use as a Cathode in Lithium-Ion Microbatteries

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