2003
DOI: 10.1063/1.1579565
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Ion-implanted In0.53Ga0.47As for ultrafast optoelectronic applications

Abstract: Undoped In0.53Ga0.47As epilayers were implanted with 2-MeV Fe+ ions at doses of 1×1015 and 1×1016 cm−2 at room temperature and annealed at temperatures between 500 and 800 °C. Hall-effect measurements show that after annealing, layers with resistivities on the order of 105 Ω/square can be achieved. Carrier lifetimes as short as 300 fs are observed for samples annealed at 500 and 600 °C. For higher annealing temperatures, characteristic times of the optical response are on the order of a few picoseconds.

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Cited by 57 publications
(47 citation statements)
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“…Defect-engineering, on the other hand, can provide a means to decrease this value if desired. 41 Spatially resolved, near-field imaging of propagating surface plasmon polaritons in graphene 9,10 has revealed high confinement factors as defined as the ratio of the free-space wavelength to the plasmon wavelength λ p . However, in our experiment the plasmon dispersion is flat, i.e., ω(q) ≈ const., in the probed momentum range on the right side of the light line (Figure 1c).…”
mentioning
confidence: 99%
“…Defect-engineering, on the other hand, can provide a means to decrease this value if desired. 41 Spatially resolved, near-field imaging of propagating surface plasmon polaritons in graphene 9,10 has revealed high confinement factors as defined as the ratio of the free-space wavelength to the plasmon wavelength λ p . However, in our experiment the plasmon dispersion is flat, i.e., ω(q) ≈ const., in the probed momentum range on the right side of the light line (Figure 1c).…”
mentioning
confidence: 99%
“…In the case of the Fe:InGaAsP emitters, the signal amplitude was found to be highest for the 4.0×10 16 cm -3 doping concentration, although this level was similar to that obtained for the lowest doping sample (1.0×10 16 cm -3 ). Similarly, for Fe:InGaAs, the THz amplitude was greatest for the lowest doped wafer, (0.5×10 16 cm -3 ), in the doping range studied here.…”
Section: Introductionmentioning
confidence: 82%
“…In summary, a range of Fe-doped InGaAs and InGaAsP wafers, grown by MOCVD with doping levels in the range 0.5×10 16 The results presented here demonstrate that high-performance systems based on CW THz generation and detection in photomixers can be accomplished using reproducible MOCVD grown material, commercial DBR lasers in the telecommunications 'C-band', simple fabrication techniques and simple driving electronics. …”
Section: Introductionmentioning
confidence: 98%
“…Slightly better results (the lifetime of~0.5 ps and the resistivity of 1.9 Ω·cm) were obtained later by the same group after implanting InGaAs with very high energy (11 MeV) Br + ions [103]; this material was used to fabricate a continuous-wave THz emitter generating at frequencies up to 0.8 THz by mixing the radiation from two laser diodes with the wavelengths around 1.55 µm. Combination of short carrier trapping times and large resistivities appropriate for ultrafast optoelectronic applications was so far achieved in [104] by implanting In 0.53 Ga 0. 47 As with Fe + ions over a certain range of the implantation doses.…”
Section: Ingaasmentioning
confidence: 99%