Ion microscopy based on laser-cooled cesium atoms

Viteau, Matthieu; Reveillard, M.; Kime, L.; Rasser, B.; Sudraud, P.; Bruneau, Yoann; Khalili, Guyve; Pillet, P.; Comparat, D.; Guerri, I.; Fioretti, A.; Ciampini, Donatella; Allegrini, M.; Fuso, Francesco

doi:10.1016/j.ultramic.2015.12.007

Cited by 36 publications

(27 citation statements)

References 24 publications

(46 reference statements)

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“…Our current setup does not include components for beam shaping or steering, therefore it is not possible to determine a focus size. However, spot sizes of a few tens of nanometers and below have been demonstrated with laser cooled sources [22,27] and by adding an appropriate ion optical setup, we expect similar performance to be achievable with our source. The stochastic nature of the ionization process leads to an exponential decay of the emission time.…”

Section: Resultsmentioning

confidence: 55%

“…Due to this large energy spread, ion beam applications typically require beam energies in the 10 keV range in order to ensure good focusing. Recently, a third type of ion source based on photoionization of laser-cooled atoms is gaining increasing attention [22][23][24]. Due to the low temperature, such a source can feature a high brightness comparable to a LMIS, however, at a much lower energy spread of less than 1 eV, which allows operation also at low beam energies of a few hundred electronvolts [17].…”

Section: Introductionmentioning

confidence: 99%

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A high repetition deterministic single ion source

et al. 2017

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We report on a deterministic single ion source with high repetition rate and high fidelity. The source employs a magneto-optical trap, where ultracold rubidium atoms are photoionized. The electrons herald the creation of a corresponding ion, whose timing information is used to manipulate its trajectory in flight. We demonstrate an ion rate of up to´-4 10 s 4 1 and achieve a fidelity for single ion operation of 98%. The technique can be used for all atomic species, which can be laser-cooled, and opens up new applications in ion microscopy, ion implantation and surface spectroscopy.

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Section: Resultsmentioning

confidence: 55%

Section: Introductionmentioning

confidence: 99%

A high repetition deterministic single ion source

et al. 2017

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“…( 14, 166 and 167 ) are still under development, although very recently, imaging with a focused Cs + beam has been demonstrated with this type of source. 169 In an alternate approach, Knuffman et al 170 have constructed and demonstrated a cold atom beam ion source of Cs ions based on a somewhat different concept, with the goal of creating a high brightness source of heavy ions for milling and circuit edit applications (Fig. 24).…”

Section: Cold Atomic Beam Sourcesmentioning

confidence: 99%

Bright focused ion beam sources based on laser-cooled atoms

McClelland

Steele

Knuffman

et al. 2016

Applied Physics Reviews

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Nanoscale focused ion beams (FIBs) represent one of the most useful tools in nanotechnology, enabling nanofabrication via milling and gas-assisted deposition, microscopy and microanalysis, and selective, spatially resolved doping of materials. Recently, a new type of FIB source has emerged, which uses ionization of laser cooled neutral atoms to produce the ion beam. The extremely cold temperatures attainable with laser cooling (in the range of 100 μK or below) result in a beam of ions with a very small transverse velocity distribution. This corresponds to a source with extremely high brightness that rivals or may even exceed the brightness of the industry standard Ga+ liquid metal ion source. In this review we discuss the context of ion beam technology in which these new ion sources can play a role, their principles of operation, and some examples of recent demonstrations. The field is relatively new, so only a few applications have been demonstrated, most notably low energy ion microscopy with Li ions. Nevertheless, a number of promising new approaches have been proposed and/or demonstrated, suggesting that a rapid evolution of this type of source is likely in the near future.

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“…Recently, two prototype ultracold cesium FIBs have been realized. Viteau et al constructed an ion microscope based on the field ionization of Rydberg-level promoted cesium atoms [5]. From the obtained resolution combined with simulations an ion beam brightness of 2.8 × 10 5 A/(m 2 sr eV) was estimated.…”

Section: Introductionmentioning

confidence: 99%

Cavity-enhanced photoionization of an ultracold rubidium beam for application in focused ion beams

et al. 2017

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A two-step photoionization strategy of an ultracold rubidium beam for application in a focused ion beam instrument is analyzed and implemented. In this strategy the atomic beam is partly selected with an aperture after which the transmitted atoms are ionized in the overlap of a tightly cylindrically focused excitation laser beam and an ionization laser beam whose power is enhanced in a build-up cavity. The advantage of this strategy, as compared to without the use of a build-up cavity, is that higher ionization degrees can be reached at higher currents. Optical Bloch equations including the photoionization process are used to calculate what ionization degree and ionization position distribution can be reached. Furthermore, the ionization strategy is tested on an ultracold beam of 85 Rb atoms. The beam current is measured as a function of the excitation and ionization laser beam intensity and the selection aperture size. Although details are different, the global trends of the measurements agree well with the calculation. With a selection aperture diameter of 52 µm, a current of (170 ± 4) pA is measured, which according to calculations is 63% of the current equivalent of the transmitted atomic flux. Taking into account the ionization degree the ion beam peak reduced brightness is estimated at 1 × 10 7 A/(m 2 sr eV).

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Ion microscopy based on laser-cooled cesium atoms

Cited by 36 publications

References 24 publications

A high repetition deterministic single ion source

A high repetition deterministic single ion source

Bright focused ion beam sources based on laser-cooled atoms

Cavity-enhanced photoionization of an ultracold rubidium beam for application in focused ion beams

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