“…Adding carbon to TiN by ion plating to form a TiCN film results in better wear performance. 4 Implantation of Cl C to chemically treat TiN films was carried out to improve the tribological properties: 5 the friction coefficient of the TiN film (¾2 µm thick) without Cl C implantation was ¾0.8, whereas it was <0.2 for the TiN film with Cl C implantation. 6 In order to clarify the effect of Cl C implantation on the friction coefficient, we analysed the surfaces of TiN films with/without Cl C implantation by scanning XPS.…”