Ion velocities in vacuum arc plasmas

Yushkov, G. Yu.; Anders, André; Окс, Е. М.; Brown, Ian

doi:10.1063/1.1321789

Cited by 234 publications

(133 citation statements)

References 19 publications

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“…Various experiments have shown that the peaks in the ion velocity distributions of vacuum arcs in high vacuum seem to be independent of charge state-and for composite cathodes, also independent of the ion mass of the composing elements [9,23]. Recently, Krasov and Paperny [43] established a theoretical model for the expansion of multicomponent plasma jets into vacuum, which was tested on experimental literature data available for vacuum cathodic arcs [8,21,23,44].…”

Section: Effects On Velocity Distributionsmentioning

confidence: 99%

“…Recently, Krasov and Paperny [43] established a theoretical model for the expansion of multicomponent plasma jets into vacuum, which was tested on experimental literature data available for vacuum cathodic arcs [8,21,23,44]. Based on ion−ion friction in the vicinity of the emission region, the model predicts an equalization of the velocities of ions with different mass and/or charge.…”

Section: Effects On Velocity Distributionsmentioning

confidence: 99%

“…In the current work, Nb−Al was chosen as a model system, since it combines a high cohesive energy refractory metal (Nb) with a low cohesive energy metal (Al). Due to their known and quite different ion properties in the plasma of single-element cathodes [23], a distinguishable behavior for intermediate composite cathodes can be expected. Furthermore, the potentially high maximum charge states of Nb ions provide sufficient data to analyze charge dependencies.…”

Section: Introductionmentioning

confidence: 99%

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Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Zöhrer

Anders

Franz

2018

Plasma Sources Sci. Technol.

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Cathodic arcs have been utilized in various applications including the deposition of thin films and coatings, ion implantation, and high current switching. Despite substantial progress in recent decades, the physical mechanisms responsible for the observed plasma properties are still a matter of dispute, particularly for multi-element cathodes, which can play an essential role in applications. The analysis of plasma properties is complicated by the generally occurring neutral background of metal atoms, which perturbs initial ion properties. By using a time-resolved method in combination with pulsed arcs and a comprehensive Nb−Al cathode model system, we investigate the influence of cathode composition on the plasma, while making the influence of neutrals visible for the observed time frame. The results visualize ion detections of 600 μs plasma pulses, extracted 0.27 m from the cathode, resolved in mass-per-charge, energy-per-charge and time. Ion properties are found to be strongly dependent on the cathode material in a way that cannot be deduced by simple linear extrapolation. Subsequently, current hypotheses in cathodic arc physics applying to multi-element cathodes, like the so-called 'velocity rule' or the 'cohesive energy rule', are tested for early and late stages of the pulse. Apart from their fundamental character, the findings could be useful in optimizing or designing plasma properties for applications, by actively utilizing effects on ion distributions caused by composite cathode materials and charge exchange with neutrals.

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Section: Effects On Velocity Distributionsmentioning

confidence: 99%

Section: Effects On Velocity Distributionsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Zöhrer

Anders

Franz

2018

Plasma Sources Sci. Technol.

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“…1,2 This corresponds to supersonic ion velocities with respect to the ion sound velocity. [3][4][5] Both Q and E 0 are important in plasma processing as the kinetic ion energy E is given by E ¼ E 0 þ QÁDU, where DU is the potential difference between the plasma and the substrate. It is well known that the ion energy affects the film structure and composition and, hence, the film properties.…”

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confidence: 99%

Ion velocities in direct current arc plasma generated from compound cathodes

Zhirkov

Eriksson

Rosén

2013

Journal of Applied Physics

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Arc plasma from Ti-C, Ti-Al, and Ti-Si cathodes was characterized with respect to charge-stateresolved ion energy. The evaluated peak velocities of different ion species in plasma generated from a compound cathode were found to be equal and independent on ion mass. Therefore, measured difference in kinetic energies can be inferred from the difference in ion mass, with no dependence on ion charge state. The latter is consistent with previous work. These findings can be explained by plasma quasineutrality, ion acceleration by pressure gradients, and electron-ion coupling. Increasing the C concentration in Ti-C cathodes resulted in increasing average and peak ion energies for all ion species. This effect can be explained by the "cohesive energy rule," where material and phases of higher cohesive energy generally result in increasing energies (velocities). This is also consistent with the here obtained peak velocities around 1.37, 1.42, and 1.55 (10 4

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“…The deposited material comes results of a three dimensional study of the ion from highly ionized plasma ejected from cathode spots. The kinetic energies of the ions are in the distribution and the plasma floating potential, measured as functions of the bias filter potential and range 15-120 eV, depending on the cathode material magnetic field intensity performed with a and on the charge-state of the ion [2], and with a total ion current amounting to 8-10 % of the total magnetically filtered . discharge current [3].…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional Ion Distribution in a Filtered Vacuum Arc Discharge

Kelly¹,

Márquez²,

Pirrera³

2006

AIP Conference Proceedings

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Articles you may be interested inExperimentally established correlation between ion charge state distributions and kinetic ion energy distributions in a direct current vacuum arc discharge J. Appl. Phys. 117, 093301 (2015) Abstract. Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at -70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported.

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Ion velocities in vacuum arc plasmas

Cited by 234 publications

References 19 publications

Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Ion velocities in direct current arc plasma generated from compound cathodes

Three-dimensional Ion Distribution in a Filtered Vacuum Arc Discharge

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