1996
DOI: 10.1016/s1350-4495(96)00006-0
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IR laser induced decomposition of tetrakis(dimethylamido)titanium for chemical vapor deposition of TiNx

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Cited by 8 publications
(3 citation statements)
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“…2220 cm -1 observed in the present work is assigned to isocyanate group [30][31][32]. The assignment of the peak at c.a.…”
Section: Ir Spectra Of Materials Outgassed At Room Temperaturementioning
confidence: 51%
“…2220 cm -1 observed in the present work is assigned to isocyanate group [30][31][32]. The assignment of the peak at c.a.…”
Section: Ir Spectra Of Materials Outgassed At Room Temperaturementioning
confidence: 51%
“…For example Arana at al . reported frequency values for iron cyanides adsorbed on TiO 2 at 2145 and 2137 cm −1 , while Janovska et al observed bands at 2140 and 2200 cm −1 in TiN which were ascribed to CN − species, respectively, bound to Ti ions and to organic chains. As to N/TiO 2 systems, the formation of CN − species has been previously reported by Belver et al The presence of cyanide groups was found only in sol−gel materials treated at high heating rate (leading thus to rutile formation) suggesting that, in such conditions, an interaction occurs between nitrogen and the organic components which can lead to the formation of C≡N bonds.…”
Section: Resultsmentioning
confidence: 99%
“…The ex situ N 1s X-ray photoelectron spectra of both films, Figure B, was fitted using four components, A through D, located respectively at 396.4, 397.4, 399.0, and 400.5 eV. Previous in situ studies have related the components around 396.0 (component A) and 399.0 eV (component C) to nitrogen bound to Ti , and to nitrogen embedded in an organic matrix, , respectively. It is possible that the components observed at 397.4 (component B) and 400.5 eV (component D), neither of which were reported in the in situ experiments mentioned, were due to the oxidation of nitride and organic components, respectively, upon exposure of the films to ambient conditions.…”
Section: Resultsmentioning
confidence: 99%