2008
DOI: 10.1016/j.nimb.2008.03.113
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Irradiation effects induced in silicon carbide by low and high energy ions

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Cited by 32 publications
(51 citation statements)
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“…This means that the crystal structure is continuous from the bulk up to the amorphous region and thus the recrystallization was epitaxial. Similar recrystallization results have been reported [16][17][18][19][20][21][22][23] for both 33 keV/nm and 20 keV/nm electronic energy losses at fluences below 10 14 cm -2 . A very high density of planar defects is also visible in the SHI irradiated specimen and accompanying diffraction pattern.…”
Section: Resultssupporting
confidence: 88%
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“…This means that the crystal structure is continuous from the bulk up to the amorphous region and thus the recrystallization was epitaxial. Similar recrystallization results have been reported [16][17][18][19][20][21][22][23] for both 33 keV/nm and 20 keV/nm electronic energy losses at fluences below 10 14 cm -2 . A very high density of planar defects is also visible in the SHI irradiated specimen and accompanying diffraction pattern.…”
Section: Resultssupporting
confidence: 88%
“…Investigations on the creation of radiation damage in SiC by SHI irradiation and the annealing of radiation damage retained after implanting different low energy ions have been reported recently [16][17][18][19][20][21][22][23]. These studies seem to agree that SHI irradiation leads to point defect production in SiC and partially restores crystallinity in a heavily damaged SiC.…”
Section: Introductionmentioning
confidence: 88%
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“…Whereas the current experimental observation could just support the existence of C-C and Si-Si homonuclear bonds, rather than provide the accurate degree of chemical disorder. Also it is agreed that the total amorphization is attained at critical threshold in deposited nuclear energy loss which is a function of ion energy and temperature (Benyagoub, A., 2008;Bolse, W., 1998). Whether the experimental measured threshold of deposited nuclear energy loss corresponds to the simulated chemical disorder is still an open question.…”
Section: Discussionmentioning
confidence: 99%
“…At present, SiC has become a promising material for several technological applications such as semiconductor production equipment parts, cooling elements in nuclear reactors, optical mirror devices in space, etc. [2,5].…”
Section: Introductionmentioning
confidence: 99%