1982 International Electron Devices Meeting 1982
DOI: 10.1109/iedm.1982.190239
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IrSi Schottky barrier diodes for infrared detection

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Cited by 16 publications
(1 citation statement)
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“…However, Metal-SiGe reaction is obviously more complex compared to that of metal-Si or metal-Ge reaction as it results in a ternary phase. For example, reactions involving Pt and SiGe have reported Ge segregation and preferential PtSi formation [1,2], this would result in various values of barrier height from the same Pt-SiGe reaction depending on the amount of Ge segregation due to different processing conditions. In view of this, it would be useful to know if effective barrier height can be varied by controlling the concentration of dopants on the SiGe surface [3,4].…”
Section: Introductionmentioning
confidence: 99%
“…However, Metal-SiGe reaction is obviously more complex compared to that of metal-Si or metal-Ge reaction as it results in a ternary phase. For example, reactions involving Pt and SiGe have reported Ge segregation and preferential PtSi formation [1,2], this would result in various values of barrier height from the same Pt-SiGe reaction depending on the amount of Ge segregation due to different processing conditions. In view of this, it would be useful to know if effective barrier height can be varied by controlling the concentration of dopants on the SiGe surface [3,4].…”
Section: Introductionmentioning
confidence: 99%