ISFET pH sensor characterization: towards biosensor microchip application

Rani, Rozina Abdul; Sidek, Othman

doi:10.1109/tencon.2004.1415019

Cited by 20 publications

(14 citation statements)

References 12 publications

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“…On average, the reference voltage experiences a shift of about 64 mV/pH being very close to the Nernst limit of 59 mV/pH . In general, for Al 2 O 3 as sensing surface a voltage shift close to the Nernst limit was expected as shown elsewhere .…”

Section: Resultssupporting

confidence: 75%

Flexible thin film pH sensor based on low‐temperature atomic layer deposition

Jakob

Gutsch

Chatelle

et al. 2017

Physica Rapid Research Ltrs

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Flexible and transparent zinc oxide (ZnO) thin film field-effect transistors (TF-FET) for the use as small volume potentiometric pH sensors are developed. Low temperature atomic layer deposition (ALD) is used for the fabrication of the metal oxides ZnO and aluminum dioxide (Al2O3). Changing the deposition temperature of the ZnO from 150 to 100 °C allowed a significant increase in resistivity by four orders of magnitude. Hence, adjusting the controlled low carrier concentration for the field-effect based sensor is demonstrated. ZnO TF-FET pH sensors fabricated on silicon/silicon dioxide (Si/SiO2) substrates are compared with sensors based on flexible and transparent polyethylene naphthalate (PEN) foil substrates. Comparison of both types of pH sensors showed successful pH sensitivity for pH ranging from 5 to 10 in both cases

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Section: Resultssupporting

confidence: 75%

Flexible thin film pH sensor based on low‐temperature atomic layer deposition

Jakob

Gutsch

Chatelle

et al. 2017

Physica Rapid Research Ltrs

View full text Add to dashboard Cite

show abstract

“…A c c e p t e d M a n u s c r i p t Table 3 shows a comprehensive comparison of temperature characteristics of various pH sensing materials. Note that the response of other metal-oxide-based pH sensor at higher temperatures has also been investigated [25][26][27][28][29][30][31][32][33][34][35]. Table 3 shows the performance of the sensor for temperatures up to 65 °C.…”

Section: Sensitivitymentioning

confidence: 99%

Temperature effects on the performance of RuO2 thin-film pH sensor

Sardarinejad

Maurya

Khaled

et al. 2015

Sensors and Actuators A: Physical

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“…Thus, by measuring the channel current or the gate potential, we can represent the pH level of solution. The advantage of ISFET as pH sensor are include fast response time, smaller in size and fabrication compatible [4]. However, the ISFET were found to have difficulties in differentiating the ions with similar charge type and number [2].…”

Section: Introductionmentioning

confidence: 99%

Neural Network Algorithm Development for Ion Sensitive Field Effect Transistor (ISFET) Sensor

Zolkapli

Ya’acob

Aziz

et al. 2018

IJET

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Ion Sensitive Field-Effect Transistor (ISFET) is a kind of sensor that able to differentiate the ion by replacing the gate of the FET with electrode and the membrane. Membrane acts as selector for the ions whereas the sensor detects the ions and converts it into electrical signal. However, the sensor has weakness to detect main ion from the interfering ion in the mixed solution when the ions have same characteristic. In this work, potassium ion (K+) and ammonium ion (NH4+) was used as the sample for both ions that have similar size. To overcome the problem, the sensor needs to be trained for pre-calibrate and pre-process by developing a model of Artificial Neural Networks (ANN) in MATLAB software. The ANN makes the model learn the pattern by the sample of inputs and outputs to estimate results or to get more accurate data. Backpropagation is used as the learning method of ANN model. The objective of this work is to develop ANN model for ISFET sensor that able to estimate the main ion in mixed solution by learning the pattern of the input and output of the sensor. The ANN model performance can be optimized by altering certain parameters in the learning algorithm. The results show that the model is able to predict with 97% accuracy and has strong and precise estimation ability with R-factor of 91.55%.

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ISFET pH sensor characterization: towards biosensor microchip application

Cited by 20 publications

References 12 publications

Flexible thin film pH sensor based on low‐temperature atomic layer deposition

Flexible thin film pH sensor based on low‐temperature atomic layer deposition

Temperature effects on the performance of RuO2 thin-film pH sensor

Neural Network Algorithm Development for Ion Sensitive Field Effect Transistor (ISFET) Sensor

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