2018
DOI: 10.1002/sia.6527
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Iterative deconvolution using the MRI model for removing experimental broadening and shift effects in SIMS depth profiles

Abstract: Correspondence Fayçal Boulsina, Département d'électronique et télécommunications, Faculté des sciences et de la technologie, During the last years, depth resolution of secondary ion mass spectrometry (SIMS) has been enhanced, mainly by solving direct and inverse problems of depth profiling. The solution of both problems is based on the depth resolution function (DRF). Solving the direct problem is frequently done by using the DRF of the Mixing-Roughness-Information depth (MRI) model, and solving the inverse pr… Show more

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