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DeLoach, J. D.; Aita, C. R.

doi:10.1023/a:1006790622162

Cited by 7 publications

(4 citation statements)

References 23 publications

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“…Their photocatalytic [32,33], photoluminescent [34], photon-enhanced thermoluminescent [35], and cathodoluminescent [36] behavior has been the subject of sustained research. ZrO 2 -TiO 2 nanolaminates are high optical refractive index solids [37]. In addition, significant optical absorption in ZrO 2 -TiO 2 nanolaminates is tunable over the ultraviolet spectrum from 3.61 to 5.70 eV by varying the ZrO 2 /TiO 2 ratio in a bilayer [38].…”

Section: Introductionmentioning

confidence: 99%

Reactive sputter deposition of metal oxide nanolaminates

Aita

2008

J. Phys.: Condens. Matter

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We discuss the reactive sputter deposition of metal oxide nanolaminates on unheated substrates using four archetypical examples: ZrO(2)-Al(2)O(3), HfO(2)-Al(2)O(3), ZrO(2)-Y(2)O(3,) and ZrO(2)-TiO(2). The pseudobinary bulk phase diagrams corresponding to these nanolaminates represent three types of interfaces. I. Complete immiscibility (ZrO(2)-Al(2)O(3) and HfO(2)-Al(2)O(3)). II. Complete miscibility (ZrO(2)-Y(2)O(3)). III. Limited miscibility without a common end-member lattice (ZrO(2)-TiO(2)). We found that, although reactive sputter deposition is a far-from-equilibrium process, thermodynamic considerations strongly influence both phase formation within layers and at interfaces. We show that pseudobinary phase diagrams can be used to predict interfacial cation mixing in the nanolaminates. However, size effects must be considered to predict specific structures. In the absence of pseudoepitaxy, size effects play a significant role in determining the nanocrystalline phases that form within a layer (e.g. tetragonal ZrO(2), tetragonal HfO(2), and orthorhombic HfO(2)) and at interfaces (e.g. monoclinic (Zr,Ti)O(2)). These phases are not bulk standard temperature and pressure phases. Their formation is understood in terms of self-assembly into the lowest energy structure in individual critical nuclei.

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Section: Introductionmentioning

confidence: 99%

Reactive sputter deposition of metal oxide nanolaminates

Aita

2008

J. Phys.: Condens. Matter

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“…Interestingly, the presence of the cubic phase is accompanied by an increase in the refractive index when the O 2 ratio is between 40 to 80%. It is known that the cubic phase of zirconia has the highest refractive index of the three polymorphs [31].…”

Section: Discussionmentioning

confidence: 99%

Ambient temperature stabilization of crystalline zirconia thin films deposited by direct current magnetron sputtering

et al. 2009

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“…Examples are ZrO 2 -Al 2 O 3 transformation-toughening coatings, 1 ZrO 2 -Y 2 O 3 ultrahard coatings, 2 and ZrO 2 -TiO 2 films for such diverse applications as high optical refractive index films, 3 and bifunctional catalysts for environmental pollution control. 4 Interfaces play an increasingly important role in determining overall film properties as the bilayer periodicity decreases.…”

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confidence: 99%

“…3 The substrates were ͗100͘ Si wafers from which the nascent oxide was not removed. The substrates were sequentially positioned under 12.7 cm diameter, 99.5% Zr and 99.995% Ti metal targets that were sputtered in a 20 mTorr, 80% Ar-20% O 2 discharge.…”

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confidence: 99%