(
              Zr,Ti
              )
                O
                  2
           interface structure in ZrO2–TiO2 nanolaminates with ultrathin periodicity

Aita, C. R.; DeLoach, J. D.; Yakovlev, V. V.

doi:10.1063/1.1492013

Cited by 14 publications

(10 citation statements)

References 24 publications

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“…Architecture B showed a major peak attributed to diffraction from the (11 1) planes of an extensive monoclinic (ZrTi)O 2 solid solution. This structure, reported in thin films in [58] for the first time, is isomorphic with m-TiO 2 , that naturally occurs in rocks [19,20], and m-ZrTiO 4 , that is produced by applying high hydrostatic pressure to orthorhombic ZrTiO 4 powder [21].…”

Section: Zro 2 -Tio 2 Nanolaminatesmentioning

confidence: 75%

Reactive sputter deposition of metal oxide nanolaminates

Aita

2008

J. Phys.: Condens. Matter

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We discuss the reactive sputter deposition of metal oxide nanolaminates on unheated substrates using four archetypical examples: ZrO(2)-Al(2)O(3), HfO(2)-Al(2)O(3), ZrO(2)-Y(2)O(3,) and ZrO(2)-TiO(2). The pseudobinary bulk phase diagrams corresponding to these nanolaminates represent three types of interfaces. I. Complete immiscibility (ZrO(2)-Al(2)O(3) and HfO(2)-Al(2)O(3)). II. Complete miscibility (ZrO(2)-Y(2)O(3)). III. Limited miscibility without a common end-member lattice (ZrO(2)-TiO(2)). We found that, although reactive sputter deposition is a far-from-equilibrium process, thermodynamic considerations strongly influence both phase formation within layers and at interfaces. We show that pseudobinary phase diagrams can be used to predict interfacial cation mixing in the nanolaminates. However, size effects must be considered to predict specific structures. In the absence of pseudoepitaxy, size effects play a significant role in determining the nanocrystalline phases that form within a layer (e.g. tetragonal ZrO(2), tetragonal HfO(2), and orthorhombic HfO(2)) and at interfaces (e.g. monoclinic (Zr,Ti)O(2)). These phases are not bulk standard temperature and pressure phases. Their formation is understood in terms of self-assembly into the lowest energy structure in individual critical nuclei.

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Section: Zro 2 -Tio 2 Nanolaminatesmentioning

confidence: 75%

Reactive sputter deposition of metal oxide nanolaminates

Aita

2008

J. Phys.: Condens. Matter

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“…Aita et al reported that a mixed interface is formed in a nanolaminate film and can affect the properties of the nanolaminate film. 17 Therefore, it can be concluded that the dielectric constant of nanolaminate films with thin sublayers is enhanced above the value calculated using the series model because of the formation of a mixture layer ͑Hf-O-Al͒ at the interface between the two sublayers and the dramatic increase of the number of mixture layers.…”

mentioning

confidence: 85%

Interface effect on dielectric constant of HfO2∕Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition

Park

Cha

Kang

2007

Applied Physics Letters

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The effect of the interface between Al 2 O 3 and HfO 2 sublayers on the dielectric constant was investigated in HfO 2 /Al 2 O 3 nanolaminate films deposited using plasma-enhanced atomic layer deposition. After annealing at 700°C, the dielectric constants of the nanolaminate films with a sublayer thickness of 40 Å or greater were the same as the calculated values for a series of capacitors consisting of amorphous Al 2 O 3 and monoclinic or tetragonal HfO 2. As the sublayer thickness was reduced to 10 Å, the dielectric constant increased up to 17.7 because a thin Hf-O-Al mixture layer, of which the number increases drastically in the nanolaminate films with thin sublayers, is formed at the interface.

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“…Although (Zr,Ti)O 2 with ordered M-fergusonite structure was encountered as a quenched high-pressure phase, it is possible that it also forms at low pressures in very finegrained materials, such as those reacted by sol-gel annealing, ball milling, or thin film sputtering. For example, a monoclinic high-pressure form of ZrTiO 4 was found to form by thin film sputtering, probably stabilized by the Gibbs-Thompson effect [9].…”

Section: Discussionmentioning

confidence: 99%

“…Due to their electrical properties, most of these compounds are objects of thin-film and nano-laminate studies [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%