1984
DOI: 10.1007/bf02656684
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Junction solar cells made with molecular beam glow discharge bombardment

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Cited by 10 publications
(3 citation statements)
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“…The arsenic fluorides have received considerable attention because of their importance in the semiconductor industry: for example, AsF 3 and AsF 5 have been used as fluorinating reagents, and AsF 3 also as a dopant . Some other AsF n species have also been observed.…”
Section: Introductionmentioning
confidence: 99%
“…The arsenic fluorides have received considerable attention because of their importance in the semiconductor industry: for example, AsF 3 and AsF 5 have been used as fluorinating reagents, and AsF 3 also as a dopant . Some other AsF n species have also been observed.…”
Section: Introductionmentioning
confidence: 99%
“…Most of these compounds are in fact extensively used in the electronic industry to perform etching and cleaning processes [1], to achieve the doping of semiconductors [2], and to deposit amorphous fluorinated materials [3]. All the MF 3 (M = N-Bi) have non-planar structures of C 3v symmetry and their bonding, properties, and reactivity have been extensively investigated, both experimentally and theoretically [4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…AsF, has been used as a fluorinating reagent (Lindahl 1980) and as a dopant in semiconductor fabrication (e.g. Caine and Charlson 1984). It also serves the role of solvent for a conducting polymer solution (Frommer et a!…”
Section: Introductionmentioning
confidence: 99%