Kinematic analysis of a translational 3-d.o.f. micro-parallel mechanism using the matrix method

Koseki, Yoshihiko; Tanikawa, Tamio; Koyachi, Noriho; Arai, Tatsuo

doi:10.1163/156855302760121927

Cited by 115 publications

(47 citation statements)

References 3 publications

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“…25 Kang calculated the stiffness of the cartwheel hinge using four general leaf springs and an imaginary body. 31 Using the stiffness matrices from these two references, 25,31 the whole flexure mechanism is modeled as rigid bodies connected through a hinge spring. There are 12 cartwheel hinges, 12 circular hinges, and 19 rigid bodies in the whole positioning system (see Fig.…”

Section: Modelingmentioning

confidence: 99%

Development of a novel 3-degrees of freedom flexure based positioning system

Kim

Ahn

Gweon

2012

Review of Scientific Instruments

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Flexure mechanisms have been widely used for nanometer positioning systems. This article presents a novel conceptual design of an ultra-precision 3-degrees of freedom (XYθ(Z)) positioning system with nanometer precision. The main purpose of this novel stage design is for the application of measurement equipment, in particular biological specimens. The stage was designed as a hollow type and with a compact size for the inverted microscope. This stage includes piezoelectric transducer actuators, double compound amplification mechanisms, moving plate, and capacitor sensors. The double compound amplification mechanism was designed using a mathematical model and analyzed by the finite element method. Since the relationship between the variables of the hinge parameters and system performances are complicated, an optimization procedure was used to obtain the optimal design parameters, which maximized the system bandwidth. Based on the solution of the optimization problem, the design of the stage and FEM simulation results are presented. Finally, the stage was manufactured and tested.

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Section: Modelingmentioning

confidence: 99%

Development of a novel 3-degrees of freedom flexure based positioning system

Kim

Ahn

Gweon

2012

Review of Scientific Instruments

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“…Because the stiffness modeling is related to specific coordinate frames, the globe coordinate frame is defined at the center of the terminal platform and the local coordinate systems of each chain are shown in Figure 8b. The matrix method [36,37], which has the advantages of terse form and high modeling accuracy, has already been widely utilized in the stiffness modeling of the compliant mechanism. Therefore, The matrix method [36,37], which has the advantages of terse form and high modeling accuracy, has already been widely utilized in the stiffness modeling of the compliant mechanism.…”

Section: Input and Output Stiffnessmentioning

confidence: 99%

“…The matrix method [36,37], which has the advantages of terse form and high modeling accuracy, has already been widely utilized in the stiffness modeling of the compliant mechanism. Therefore, The matrix method [36,37], which has the advantages of terse form and high modeling accuracy, has already been widely utilized in the stiffness modeling of the compliant mechanism. Therefore, it is adopted to establish the analytical model of the 2-DOF CPM.…”

Section: Input and Output Stiffnessmentioning

confidence: 99%

Systematic Design Method and Experimental Validation of a 2-DOF Compliant Parallel Mechanism with Excellent Input and Output Decoupling Performances

Jiang

Wang

et al. 2017

Applied Sciences

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Abstract:The output and input coupling characteristics of the compliant parallel mechanism (CPM) bring difficulty in the motion control and challenge its high performance and operational safety. This paper presents a systematic design method for a 2-degrees-of-freedom (DOFs) CPM with excellent decoupling performance. A symmetric kinematic structure can guarantee a CPM with a complete output decoupling characteristic; input coupling is reduced by resorting to a flexure-based decoupler. This work discusses the stiffness design requirement of the decoupler and proposes a compound flexure hinge as its basic structure. Analytical methods have been derived to assess the mechanical performances of the CPM in terms of input and output stiffness, motion stroke, input coupling degree, and natural frequency. The CPM's geometric parameters were optimized to minimize the input coupling while ensuring key performance indicators at the same time. The optimized CPM's performances were then evaluated by using a finite element analysis. Finally, a prototype was constructed and experimental validations were carried out to test the performance of the CPM and verify the effectiveness of the design method. The design procedure proposed in this paper is systematic and can be extended to design the CPMs with other types of motion.

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“…In [11], kinematic analysis of a translational 3-DOF micro parallel manipulator is analyzed using the compliance and stiffness method. In [16], a 3-DOF parallel stage is proposed with the design optimization with flexure hinge as an application for silicon wafer handling.…”

Section: B Flexure Joints In Roboticsmentioning

confidence: 99%

Micro Planar Parallel Mechanism Design using Configuration Change Effect of Flexure Mechanism

Kang

Cho²

2007

2007 International Symposium on Computational Intelligence in Robotics and Automation

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Flexure joints are frequently used in precision mechanisms, from motion stages to micro-robots. Due to their monolithic construction and superior wear and loss properties, flexure joints can be used to reduce the mechanism size and increase the positioning accuracy. The compliance of flexure joints, however, can affect the static and dynamic characteristics of the overall mechanism. The objective of this paper is to develop analysis and design tools for general platform type parallel mechanisms that contain flexure joints.In this paper, a micro planar parallel mechanism that has 3-DOF motion is examined by considering the configuration change effect. Usually, MEMS mechanism is designed for a specific purpose with a motion restriction. Here, using the conventional planar parallel robotics design, a general purpose of micro mechanism is presented.

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Kinematic analysis of a translational 3-d.o.f. micro-parallel mechanism using the matrix method

Cited by 115 publications

References 3 publications

Development of a novel 3-degrees of freedom flexure based positioning system

Development of a novel 3-degrees of freedom flexure based positioning system

Systematic Design Method and Experimental Validation of a 2-DOF Compliant Parallel Mechanism with Excellent Input and Output Decoupling Performances

Micro Planar Parallel Mechanism Design using Configuration Change Effect of Flexure Mechanism

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