Kinetic Monte Carlo study on boron diffusion posterior to pre-amorphization implant process

Park, Soon-Yeol; Kim, Young-Kyu; Won, Taeyoung

doi:10.1016/j.mee.2008.08.010

Cited by 2 publications

(1 citation statement)

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“…The usefulness of a numerical technique depends on the surface area, time scale, and the nature of the properties to be predicted. For example, molecular dynamics (MD) simulations − provide detailed information of every atom’s trajectory, kinetic Monte Carlo (KMC) simulations − can handle bigger systems while employing a stochastic approach to describe diffusion of deposited atoms, and analytic coarse-grained models − can virtually cover unlimited areas at the expense of limitations in the level of detail at the atomic scale . Out of these simulation techniques, KMC provides an advantage of combining power, flexibility, and numerical efficiency.…”

Section: Introductionmentioning

confidence: 99%

Controlled Self-Assembly of Nanocrystalline Arrays Studied by 3D Kinetic Monte Carlo Modeling

2011

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Fabrication of self-assembled arrays of nanocrystals (NCs) by physical vapor deposition (PVD) is a promising technique rated highly for its potential for various electronic, photonic, and sensing applications. However, the self-assembly process is not straightforward to control and direct in a desired way. A detailed understanding of how to control the size, shape, and density of self-assembled NCs by varying the accessible PVD process conditions, such as deposition rate, duration, or temperature, is critical for the potential of self-assembled nanofabrication to be fully realized. In this paper, we report a systematic kinetic Monte Carlo modeling that explicitly represents PVD synthesis of self-assembled metallic NCs on a crystalline substrate. We investigate how varying the duration of deposition, deposition rate, temperature, and substrate wetting conditions may affect the morphologies of arrays of self-assembled metallic islands and compare our results with previously reported experimentally observed surface morphologies generated by PVD and theoretical studies.

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