Kinetic studies on thermal decomposition of MOVPE sources using fourier transform infrared spectroscopy

Reactor-scale uniformity of selective-area performance in InGaAsP system

“…The simulation is based on the study on the gas-phase decomposition of precursor [13], the modeling of reaction mechanism [14][15][16], and the temperature calculation [17]. The reactions for the simulation of InGaAsP growth are listed in Table 1.…”

A numerical study on heat transfer and film growth rate of InP and GaAs MOCVD process

“…Intermediates for group V materials, TBAs and TBP, were assumed to be AsH and PH. Pre-exponential factor, A, and reaction energy, E a , shown in Table 2 were obtained from our group's experimental results [2,11]. Values of A fifty times larger than the original one for reaction II were used according to the gas-phase decomposition study [2].…”

“…For the successful simulation of film growth rate and composition variation of InGaAsP related films, the authors' group has executed kinetic study on the gas-phase decomposition of precursor [2]. Using this experimental reaction data, we tried to model the film growth process by using computational fluid dynamics and predict reactive intermediate [3].…”

Evaluation of incorporation efficiency of group V source gases in metal organic chemical vapor deposition of GaInNAs for high quality 1.21μm quantum-well ridge wave guide lasers

“…At this low temperature, the decomposition efficiency of group V source gases is quite low [4]. Only limited portion of the supply of the group V source gases is expected to be effective in the growth.…”

“…Various efforts have been focused on the estimation and the control of the concentration of these gases near the surface of the substrate [2][3][4].…”