Kinetics and Film Properties of Boron Nitride Derived from Trimethoxyborane/Ammonia by Chemical Vapor Deposition

Abstract

The kinetics of the CVD of boron nitride from trimethoxyborane (TMOB) and ammonia (NH 3 ) under atmospheric pressure was investigated by varying the following process parameters: temperature, residence time of the reactants, molar fraction of TMOB, and the NH 3 /TMOB ratio, c. A kinetic power law equation was derived, that describes the experimental results with good accuracy. The reaction order with respect to TMOB is found to be 0.9 and ± 0.2 with respect to NH 3 . Between 800 C and 950 C, the deposition rate is controlled by the surface reaction kinetics with apparent activation energy of 115.1 kJ mol ±1 . The deposited BN films were characterized by IR spectroscopy, Raman spectroscopy, and X-ray diffraction (XRD). The microstructure of the deposits depends on the nature of the substrates used. Turbostratic boron nitride (t-BN) was deposited on graphite, and hexagonal boron nitride (h-BN) on alumina substrates. X-ray photoelectron spectroscopy (XPS) analyses show nearly stoichiometric BN films for deposition temperatures in the range 850±950 C for high amounts of ammonia (100 < c < 150) in the feed gas.

Boron nitride coatings by chemical vapor deposition from borazine

“…The coatings deposited at 800°C and 900°C showed two main bands at 1390 cm −1 and 797 cm −1 , which was typical of hexagonal boron nitride [8,27]. These bands were attributed to B-N stretching and B-N-B bending respectively.…”

“…Some boron-organic substances such as B(OMe) 3 , B(NMe 2 ) 3 , H 3 BN(C 2 H 5 ) 3 , H 3 BNH(C 3 H 3 ) 2 , and B 3 N 3 (CH 3 ) 9 were used to deposit boron nitride. [8][9][10][11]. It was obvious that the C and O containing in the precursors were potential impure elements.…”

Specific Ion Effects on Aggregation and Charging Properties of Boron Nitride Nanospheres

“…6 These are promising materials; accordingly, they show distinct electronic and optical properties compared to their isoelectronic counterpart. 7 Both BNNSs and BNNTs display outstanding features, such as high thermal stability and conductivity, 8 chemical inertness, 9 corrosion, and oxidation resistance. 10 Due to the above-mentioned properties, BNNSs have been proposed in many applications, for instance, as an effective spherical catalyst support.…”

High-temperature properties and associated structure evolution of continuous SiNO fiber-reinforced BN composites for wave transparency

“…The absorption peak at around 1460 cm À1 can be assigned to B-N stretching in a cyclic B-N ring in the matrix. The main bands at 1390 cm À1 and 800 cm À1 are typical absorptions of hexagonal boron nitride in the matrix [31,32], with the latter corresponding to a B-N-B bending vibration [33]. For the heat-treated specimen, an intensity increase of the peak at around 1390 cm À1 and a wave number shift from 800 to 650 cm À1 may be attributed to more regular hexagonal boron nitride rings being formed at elevated temperature.…”